Advantech Global, Ltd

Brian Arthur Bucci

David N Monto

Shen-Chih Tung

In a multi-mask alignment system and method, a carrier frame is provided having a number of apertures therethrough. A number of shadow mask-frame combinations are also provided. Each shadow mask-frame combination includes a first set of alignment features and each shadow mask-frame combination is positioned on a first side of the carrier with the frame supporting the shadow mask in alignment with one of the apertures. A single alignment stage is provided and a control system including a programmed controller is also provided. Under the control of the controller, the single alignment stage translates to each shadow mask-frame combination, one-at-a time, and adjusts the position of the shadow mask-frame combination based on positions of the first set of alignment features determined by the controller.

Multi-mask alignment system and method

In an apparatus and method for multi mask alignment, a carrier is provided that includes apertures therethrough. For each aperture, a combination frame and shadow mask that includes alignment features is positioned on spacers supported by the carrier with the shadow mask of the combination in coarse alignment with the aperture. Next, each combination frame and shadow mask is moved to a position spaced from the spacers whereupon the alignment system, under the control of a controller, individually aligns each combination frame and shadow mask to align the alignment features of the combination with reference alignment features associated with the combination. Each combination frame and shadow mask is then returned to a position on the spacers whereafter each combination frame and shadow mask is secured to the carrier. In an example, all of the combination frames and shadow masks can be aligned simultaneously.

Apparatus and method for planarizing multiple shadow masks on a common carrier frame

In a multi-mask alignment system and method, a carrier frame is provided having a number of apertures therethrough. A number of shadow mask-frame combinations are also provided. Each shadow mask-frame combination includes a first set of alignment features and each shadow mask-frame combination is positioned on a first side of the carrier with the frame supporting the shadow mask in alignment with one of the apertures. An alignment system is provided and a control system including a programmed controller is also provided. Under the control of the controller, the alignment system is caused to adjust the position of each shadow mask-frame combination with respect to the carrier based on positions of the first set of alignment features determined by the controller.

In a system and method of shadow mask tensioning, an object having second set of alignment features is positioned on a side of shadow mask having a first set of alignment features such that the object and the shadow mask can move independently of each other and the first and second sets of alignment features are not in final alignment. Tension is then applied to the shadow mask to bring the first set of alignment features into final alignment with the second set of alignment features. The alignment features of the shadow mask can include at least one deposition aperture of the shadow mask.

Shadow mask tensioning method and apparatus

In a method and apparatus for shadow mask tensioning, a shadow mask frame and an anchor frame are positioned in spaced relation defining a gap therebetween and a shadow mask is positioned on the shadow mask frame and the anchor frame with an interior portion of the shadow mask extending across the gap. An edge of the shadow mask is affixed to the anchor frame and the shadow mask is tensioned by urging the interior portion of the shadow mask into the gap. Once the shadow mask has been tensioned to a desired extent, the shadow mask is affixed to the shadow mask frame. Thereafter, the combination of the shadow mask affixed to the shadow mask frame is separated from the anchor frame.

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Pittsburgh, PA, United States of America

Brian Arthur Bucci