Magic Leap, Inc.

Brett William Best

Michael Nevin Miller

Kang Luo

Roy Matthew Patterson

Charles Scott Carden

Satish Sadam

Matthew S Shafran

Qizhen Xue

Joseph Michael Imhof

Kangkang Wang

Jeremy Lee Sevier

Systems and methods for managing multi-objective alignments in imprinting (e.g., single-sided or double-sided) are provided. An example system includes rollers for moving a template roll, a stage for holding a substrate, a dispenser for dispensing resist on the substrate, a light source for curing the resist to form an imprint on the substrate when a template of the template roll is pressed into the resist on the substrate, a first inspection system for registering a fiducial mark of the template to determine a template offset, a second inspection system for registering the imprint on the substrate to determine a wafer registration offset between a target location and an actual location of the imprint, and a controller for controlling to move the substrate with the resist below the template based on the template offset, and determine an overlay bias of the imprint on the substrate based on the wafer registration offset.

Managing multi-objective alignments for imprinting

Growing community of inventors

Round Rock, TX, United States of America

Brett William Best