Robert Boschgmbh

Brett Matthew Diamond

John William Zinn

A MEMS backplate. The MEMS backplate includes a first mesh pattern having a first height and a first arrangement of openings, and a second mesh pattern having a second height and a second arrangement of vent hole apertures. The second mesh pattern is contained within the opening formed by the first mesh pattern.

Mesh in mesh backplate for micromechanical microphone

A MEMS device. The device includes a membrane, and a reinforced backplate having a plurality of openings. The reinforced backplate include a first layer, and a second layer coupled to the first layer.

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Pittsburgh, PA, United States of America

Brett Matthew Diamond