Average Co-Inventor Count = 4.50
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Asm Nutool, Inc. (2 from 42 patents)
2 patents:
1. 6926589 - Chemical mechanical polishing apparatus and methods using a flexible pad and variable fluid flow for variable polishing
2. 6857947 - Advanced chemical mechanical polishing system with smart endpoint detection