International Business Machines Corporation

Globalfoundries Inc.

Mars, Incorporated

Samsung Electronics Co., Ltd.

Elpis Technologies Inc.

Toshiba America Electronic Components, Inc.

Brent A Anderson

Edward J Nowak

Andres Bryant

Junli Wang

Jed Hickory Rankin

Lawrence Alfred Clevenger

Robert Russell Robison

Nicholas Anthony Lanzillo

Terence B Hook

Kisik Choi

Ruilong Xie

Christopher J Penny

William F Clark, Jr

Albert Manhee Chu

Fee Li Lie

Huiming Bu

John J Ellis-Monaghan

Hemanth Jagannathan

Ruqiang Bao

Choonghyun Lee

Xuefeng Liu

Alain F Loiseau

Kangguo Cheng

Stuart A Sieg

Chen Zhang

Bruce Bennett Doris

Shogo Mochizuki

Balasubramanian Pranatharthiharan

Su Chen Fan

Rajasekhar Venigalla

Anthony K Stamper

Jeffrey Bowman Johnson

Steven J Bentley

Jeffrey P Gambino

Heng Wu

Edmund Juris Sprogis

Chih-Chao Yang

Dechao Guo

Benjamin David Briggs

Hiroaki Niimi

Herbert Lei Ho

John Edward Barth, Jr

Matthew Joseph Breitwisch

Christopher Joseph Waskiewicz

Tenko Yamashita

Carl John Radens

Chanro Park

Jeffrey W Sleight

Tak H Ning

Julien Frougier

Sivananda K Kanakasabapathy

Reinaldo Ariel Vega

James William Adkisson

Mark David Jaffe

Robert K Leidy

John Ryan Sporre

Joshua M Rubin

Randy William Mann

Gauri V Karve

Jeanne P Bickford

Jason D Hibbeler

Juntao Li

David V Horak

Theodorus E Standaert

Josephine B Chang

Vijay Narayanan

Lars W Liebmann

Takeshi Nogami

Soon-Cheon Seo

Christian Lavoie

Kirk David Peterson

Injo Ok

Min Gyu Sung

Paul Stephen Andry

Roy Rongqing Yu

Ravikumar Ramachandran

Koichi Motoyama

Muthumanickam Sankarapandian

Indira P Seshadri

Paul Charles Jamison

Alexander Reznicek

Steven J Holmes

Xin Miao

Ramachandra Divakaruni

Mark Charles Hakey

Mukta G Farooq

Michael A Guillorn

Son Van Nguyen

Wenyu Xu

Zuoguang Liu

Alvin Jose Joseph

Kerry Bernstein

Subramanian Srikanteswara Iyer

Sanjay C Mehta

Yann Mignot

Wayne Frederick Ellis

Omer H Dokumaci

Robert H Dennard

Richard Quimby Williams

Anthony I Chou

A semiconductor structure having improved performance is provided that includes a local enlarged via-to-backside power rail (VBPR) contact structure which connects a source/drain region of one field effect transistor (FET) to a backside power rail.

Local enlarged via-to-backside power rail

A microelectronic structure including a plurality of lower transistors and a plurality of upper transistor, where each of the plurality of lower transistors and the plurality of upper transistors includes a plurality of channel. Where an upper center vertical axis of each of the plurality of upper transistors is staggered from a lower center vertical axis of each of the lower transistors. A lower gate cut is located between each of the plurality of lower transistors. A first upper gate cut located adjacent to a first upper transistor of the plurality of upper transistors, where the first upper gate cut is in direct contact with a plurality of first channels of the first upper transistor.

Method and structure of forming independent contact for staggered CFET

A semiconductor device includes a field effect transistor (FET). The FET includes a gate and a first source or drain (S/D) region. A frontside S/D contact may be connected to and extend vertically upward from a top surface of the first S/D region. The FET further includes a second S/D region. The second S/D region includes a conduit liner and an inner column internal to the conduit liner that extends below a bottom surface of the wraparound gate. A backside S/D contact may be connected to and extend vertically downward from a bottom surface of the second S/D region.

Field effect transistor with backside source/drain

A semiconductor memory cell comprising six vertical-transport field-effect transistors (VTFET) on a wafer. The six VTFET are in a first layer. The six VTFET are in a first row.

High density static random-access memory

Embodiments of present invention provide a semiconductor structure. The semiconductor structure includes a metal level, the metal level includes a metal strip including a notch at a side of the metal strip or a pass-through inside the metal strip, wherein the notch or the pass-through is at least partially filled with a dielectric material. The metal level further includes a conductive wiring that vertically passes through the metal strip. The conductive wiring is at least partially inside the notch or inside the pass-through and is insulated from the metal strip by the dielectric material. Methods of manufacturing the semiconductor structure are also provided.

Pass-through wiring in notched interconnect

A semiconductor device is provided. The semiconductor device includes a field effect transistor (FET) including first and second source/drain (S/D) epitaxial regions. The semiconductor device also includes a gate cut region at cell boundaries between the first and second S/D epitaxial regions, a dielectric liner and a dielectric core formed in the gate cut region, and a backside power rail (BPR) and a backside power distribution network (BSPDN). The semiconductor device also includes a power via passing through the dielectric core and connecting to the BPR and BSPDN, first metal contacts formed in contact with the first and second S/D epitaxial regions, and a via to backside power rail (VBPR) contact. The dielectric liner separates the power via from the first S/D epitaxial region.

Semiconductor device with power via

A top via interconnect with enlarged via top and a fabrication method therefor. One embodiment may comprise a semiconductor interconnect structure, comprising a first dielectric layer having a top surface, a bottom metal line formed in the dielectric layer, a second dielectric layer deposited above the top surface of the first dielectric layer, a via etched through the second dielectric layer above the bottom metal line, wherein the via exposes at least a portion of the top surface of the first dielectric layer, and a metal stud in the via that extends over the exposed at least a portion of the first dielectric layer. The metal stud in the via may further comprise a shoulder surface and a convex top surface.

TopVia interconnect with enlarged via top

A VTFET is on a wafer and a backside power delivery network is on a backside of the wafer. A first backside contact is connected to a gate of the VTFET and a first portion of the backside power delivery network. The VTFET has a first width and the first width is a contacted poly pitch (CPP). The first backside contact may be at least the first width from the VTFET. The first backside contact may be double the first width from the VTFET.

Vertical-transport field-effect transistor with backside gate contact

Embodiments disclosed herein include a semiconductor structure. The semiconductor structure may include a static random access memory (SRAM) cell. The SRAM cell may include a first section of the SRAM cell with a first pull-up transistor, first pull-down transistor, and first pass-gate transistor. The SRAM cell may include a second section of the SRAM cell with a second pull-up transistor, second pull-down transistor, and second pass-gate transistor. The first section of the SRAM cell and the second section of the SRAM cell may be arranged in a non-rectangular cell layout with the first pass-gate located at a first end of the non-rectangular cell layout and the second pass-gate at a second end of the non-rectangular cell layout opposite the first end.

High density stacked vertical transistor static random access memory structure

A plurality of transistor components, a system, and a method of forming a vertically stacked transistor structure within a wafer. The plurality of transistor components may include a first bottom transistor, where the first bottom transistor includes a channel, a gate, a source, and a drain. The plurality of transistor components may also include a first contact on top of the first bottom transistor, where the first contact is proximately connected to the first bottom transistor. The plurality of transistor components may also include a first set of stacked transistors, where the first set of stacked transistors includes a second top transistor on top of a second bottom transistor.

Dummy fin contact in vertically stacked transistors

VFET devices having a robust gate extension structure using late gate extension patterning and self-aligned gate and source/drain region contacts are provided. In one aspect, a VFET device includes: at least one bottom source/drain region present on a substrate; at least one fin disposed on the at least one bottom source/drain region, wherein the at least one fin serves as a vertical fin channel of the VFET device; a gate stack alongside the at least one fin; a gate extension metal adjacent to the gate stack at a base of the at least one fin; a barrier layer that separates the gate extension metal from the gate stack; and at least one top source/drain region at a top of the at least one fin. A VFET device that includes multiple VFETs present on a substrate, and a method of forming a VFET device are also provided.

Late gate extension

A long channel field-effect transistor is incorporated in a semiconductor structure. A semiconductor fin forming a channel region is configured as a loop having an opening therein. A dielectric isolation region is within the opening. Source/drain regions epitaxially grown on fin end portions within the opening are electrically isolated by the isolation region. The source/drain regions, the isolation region and the channel are arranged as a closed loop. The semiconductor structure may further include a short channel, vertical transport field-effect transistor.

Looped long channel field-effect transistor

A semiconductor device includes a first vertical field-effect transistor comprising a first set of vertical fins and a second set of vertical fins separated by a first isolation pillar structure. The semiconductor device further includes a second vertical field-effect transistor adjacent to the first vertical field-effect transistor, the second vertical field-effect transistor comprising a first set of vertical fins and a second set of vertical fins separated by a second isolation pillar structure.

Vertical field-effect transistor with isolation pillars

A semiconductor structure including a first logic cell having a first plurality of nanosheet devices along an axis and a second logic cell having a second plurality of nanosheet devices along the axis. Nanosheets of the second plurality of nanosheet devices are wider than nanosheets of the first plurality of nanosheet devices. The first logic cell is a same type as the second logic cell. The first and second logic cells can include inverter circuits or NAND circuits or NOR circuits. When the first logic cell has a height X, a width Y, and an effective width (W) Z, then the second logic cell has a height 2X, a width Y, and W>2.5 Z.

Staggered stacked circuits with increased effective width

A stacked layer memory for a SRAM includes a first layer of the SRAM, including multiple transistors of a first type, and includes a second layer of the SRAM, having multiple transistors of a second type. The first and second layers are different layers stacked vertically. A width of individual SRAM cells of the stacked layer memory is defined at least by a pitch of a single transistor of the transistors of the first type and the transistors of the second type. A method for forming the stacked layer memory for the SRAM includes forming the first layer and the second layer. The first and second layers are different layers and are formed to be stacked vertically. A width of individual SRAM cells of the stacked layer memory is defined at least by a pitch of a single transistor of the transistors of the first and second types.

Stacked layer memory suitable for SRAM and having a long cell

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Jerihco, VT, United States of America

Brent A Anderson