University of Michigan

Brendan E Casey

Kensall D Wise

Mayurachat Ning Gulari

Gayatri Eadara Perlin

A microsystem comprising a substrate having an aperture formed therethrough. The aperture includes a first cross-section and a second cross-section&#x2014;the first cross-section being smaller than the second cross-section to define a ledge therebetween. A probe member is disposed within the aperture of the substrate, such that a backend of the probe member defines a cross-section that is greater than the first cross-section of the aperture and smaller than the second cross-section such that the probe member engages the ledge. A plurality of probe shanks extend from the probe member. Each of the probe shanks includes a plurality of leads disposed there along. Each of the leads extending from the probe shanks to an opposing side of the probe member.

Growing community of inventors

Ann Arbor, MI, United States of America

Brendan E Casey