Asml Netherlands B.v.

Asml Holding N.v.

Axon Instruments, Inc.

Branko Bem

Yuri Vladimirovich Osipchuk

Dikran S Babikian

Alexander A Dromaretsky

Yuriy Roll

Dikran Babiklan

Alan S Finkel

Methods and apparatus for controllably dispensing photoresist solutions and other fluids in semiconductor manufacturing equipment from an array of syringe-based fluid dispensers. A multi-syringe fluid dispensing system is provided for photoresist coating within a wafer track coating module. The coating module may contain a spin chuck that is positioned within a catch cup. A robotic dispense arm and gripper assembly may be positioned within the coating module for gripping and positioning a fluid syringe. An array of syringes may be stored on a solution tray within the wafer track coating module for holding a plurality of fluid syringes containing photoresist solutions.

Methods and apparatus for dispensing semiconductor processing solutions with multi-syringe fluid delivery systems

The cell-delivery unit of a high-throughput electrophysiological testing system is implemented as a reusable movable unit suitable for repetitive delivery of cells to a disposable, multi-aperture patch-clamp tray. An electric field emanating from the patch aperture is used to align the dispenser with the aperture. A set of electrodes in the nozzle of the dispenser is used to detect the electric field and effect the alignment. According to another aspect of the invention, dielectrophoretic fields produced by sets of electrodes in the nozzle form a retaining cage that is used first to suspend a test cell directly above the patch aperture and then to urge the cell toward it. A movable cell sorter may also be coupled to the cell-delivery unit.

Detachable cell-delivery system for patch-clamp unit

Growing community of inventors

Newark, CA, United States of America

Branko Bem