Corning Incorporated

Bradford Giles Ackerman

Kenneth Edward Hrdina

Lisa Anne Moore

Bradley Frederick Bowden

Claude L Davis, Jr

C Charles Yu

Nikki J Russo

A method for producing a fused silica glass containing titania includes synthesizing particles of silica and titania by delivering a mixture of a silica precursor and a titania precursor to a burner, growing a porous preform by successively depositing the particles on a deposition surface while rotating and translating the deposition surface relative to the burner, and consolidating the porous preform into a dense glass.

Method for producing titania-doped fused silica glass

A lithographic stage includes a platen having a top face and a bottom face and a holder for holding an optical component on the top face of the platen. The platen is made of a light-weight material such as high purity fused silica or ultra low expansion glass. The bottom face of the platen may further include means for connecting to a positioning device in an extreme ultraviolet lithography system.

Silica-based light-weight EUV lithography stages

Growing community of inventors

Scurry, TX, United States of America

Bradford Giles Ackerman