United Microelectronics Center Co., Ltd

Bowen Li

Junbo Feng

Jiguang Zhu

Guowei Cao

An edge coupler and a fabrication method therefor are provided. The method includes: providing a semiconductor-on-insulator substrate, the semiconductor-on-insulator substrate including a first substrate, an insulating layer on the first substrate, and a semiconductor layer on the insulating layer; patterning the semiconductor layer to form a first waveguide; forming a first dielectric layer on the insulating layer; forming a second dielectric layer on the first dielectric layer and the first waveguide; forming a second waveguide on the second dielectric layer; forming a third dielectric layer covering the second waveguide; bonding the third dielectric layer to a carrier substrate on a side of the third dielectric layer away from the second waveguide; removing the first substrate; and forming a fourth dielectric layer on a surface of the insulating layer.

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CHONGQING, China

Bowen Li