Beijing Sevenstar Flow Co., Ltd.

Beijing Aurasky Electronics Co., Ltd.

Bowen Deng

Feng Zhang

Qi Wang

Lei Hu

Xiao Li

Changhua Mou

Di Zhao

Zhen Peng

Chen Sui

Zhaoxing Li

Changhua Mu

Qingli Yang

Yitao Zou

Provided is pressure sensor, including top cover assembly, upper seat, movable membrane; each of top and bottom of upper seat is provided with opening, top cover assembly seals opening at top of upper seat, movable membrane seals opening at bottom of upper seat; top cover assembly, upper seat, movable membrane form pressure reference chamber, and pressure sensor detects gas pressure on side of movable membrane away from top cover assembly based on state of movable membrane; at least one gas guide passage is formed at top cover assembly, and is configured to connect pressure reference chamber to outside; top cover assembly includes at least one blocking member configured to seal gas guide passage; and blocking member seals gas guide passage after being heated to temperature higher than preset melting temperature to be at least partially melted and being cooled to solidify. Manufacturing method for pressure sensor is further provided.

Pressure sensor with manufacturing efficiency and structure stability

A mass flow controller includes control module, fluid passage, flow regulating valve, flow sensor disposed between inlet and flow regulating valve, and pressure sensor disposed at outlet. The control module is configured to enter pressure feedback regulation mode when variation amount of target flow value exceeds preset threshold, and enter flow feedback regulation mode after fluid flow value detected by flow sensor meets first stabilization condition. The control module is configured to, in pressure feedback regulation mode, perform calculation according to fluid pressure value and target flow value to obtain opening regulation amount, and regulate opening degree of flow regulating valve according to opening regulation amount. The control module is also configured to, in flow feedback regulation mode, perform calculation according to fluid flow value and target flow value to obtain opening regulation amount, and regulate opening degree of flow regulating valve according to opening regulation amount.

Mass flow controller and flow control method therefor

Growing community of inventors

Beijing, China

Bowen Deng