Robert Boschgmbh

Botho Ziegenbein

Bernd Maihoefer

Martin Holland

Jiri Marek

Lothar Gademann

Dieter Seipler

Dietrich Bergfried

Richard Muehlheim

Gerald Hopf

Ulrich Kippelt

Uwe Konzelmann

Michael Offenberg

Hans Hecht

Josef Kleinhans

Ulrich Goebel

Guenther Findler

Frank Bantien

Eckart Reihlen

Gunther Stecher

Guenther Stecher

Bernhard Mattes

Werner Nitschke

Peter Nolting

Ralf Henne

Detlef Baresel

Andreas Reppich

Franz Schmich

Albert-Andreas Hoebel

Thomas Walker

Peter Schaedler

Klaus Miekley

Klaus Meder

Uwe Foell

Bernd Maihoeffer

Roland Feucht

Herbert Boehm

Frank Kursawe

An electronic device includes a resonant circuit and an evaluation circuit. The resonant circuit includes an acceleration-sensitive sensor which is excited to vibrate during a testing phase of the acceleration-sensitive sensor. The evaluation circuit is coupled to the resonant circuit to determine a performance reliability of the acceleration-sensitive sensor.

Electronic device having an acceleration-sensitive sensor

Acceleration sensor

A sensor device has a quartz tuning fork and an analysis circuit arranged on a common board inside a common housing. The quartz tuning fork has its own, second housing within the common housing for acoustically decoupling the tuning fork from the analysis circuit. The second housing also has an opening for equalizing the pressure and temperature between the second housing and the rest of the common housing. The analysis circuit, which is connected via the electrical wires to the quartz tuning fork, performs linearization, signal amplification and elimination of environmental influences on the signals emitted by the quartz tuning fork. The signals processed by the analysis circuit are further transmitted via common housing's electrical contacts to external elements. Because of the physical proximity of the quartz tuning fork and the analysis circuit, interference attributable to electrical connections between the two elements is minimized. Furthermore, because the tuning fork and the analysis circuit are exposed to the same temperature, temperature-related fluctuations in the electrical signals of the tuning fork may be accurately counter-balanced by the analysis circuit.

Sensor with quartz tuning fork

A piezoelectric force sensor includes a piezoelectric plate, with one electrode on each of the top and bottom sides of the plate. One of the electrodes is electrically connected via a conductor to a contact pad. In the case that the piezoelectric plate experiences breakage, the conductor is broken, and the remaining residual capacitance of the conductor and contact pad becomes so comparatively small that the breakage can be reliably detected.

Piezoelectric force sensor

An acceleration sensor, which is particularly adapted for use in motor vehicles, is improved by structuring it to be readily testable, to assure reliability before installation. The acceleration sensor has a piezo element (1), which consists of at least two piezo-electric plates (2) placed on top of each other, the piezo-electrical polarization of which is oriented in opposite directions. At least two electrodes (9) are placed on each of the topside (7) and the underside (8) of the piezo element (1). For testing the sensor, the piezo element is deformed by the application of an electrical voltage to electrodes (9) of a first lateral portion (11a) of the piezo element. This deformation is detected by means of a deformation-generated voltage at the electrodes (9) of a second lateral portion (11b) of the piezo element.

Acceleration sensor with oppositely-polarized piezoelectric plates

A mass flow sensor includes a measuring element arranged on a membrane that is clamped in a frame. The sensor is formed by introducing a recess into a silicon wafer. Through the application of a recess having perpendicular walls, the thickness of the frame can be reduced, thus allowing the required surface area of the wafer to also be reduced.

Mass flow sensor having a measuring element arranged on a membrane

A mass-flow sensor includes a measuring element on a membrane and a media-temperature measuring element on a separate membrane. By configuring the media-temperature measuring element on a membrane, the mass-flow sensor quickly reacts to changes in the temperature of the flowing medium.

Mass-flow sensor

Measuring cell for use with a sensor for measuring the mixture ratio of

Sensor for measuring acceleration and tilt with a bubble level

A sensor (10) for measurement of acceleration and/or tilt of a movable object, particularly a motor vehicle, features an interior space (12) partially filled with fluid (15). Within that space, at least two heatable, temperature-sensitive electrical circuit elements are arranged so that, in a rest or initial position of the sensor, they are equally covered or wetted by the fluid. If the acceleration and tilt of the movable object are both zero, or the two cancel each other out, the sensor reading is zero. If this is not the case, the acceleration or tilt leads to a differing degree of coverage or wetting of the at least two circuit elements, and thus to a non-zero sensor reading.

Fluid-based acceleration and tilt sensor

A gas sensor device has a carrier plate of ceramic or glass. The carrier has apertures which leave only strips in a spiral configuration connecting a middle region of the carrier to the outer region thereof. The apertures may be mere slits separating the connection strips or they may be apertures providing larger air gaps. On each middle region so provided on the carrier a sensor element is located that has two electrodes and a sensitive layer which establishes a conducting connection between the electrodes. The electrodes and the sensitive layer are directly applied to the upper surface of the middle region. The two electrodes are comb shaped and are placed in inter-digital configuration to define a meandering gap between them. On the underside of the middle region of the carrier a heating element for the sensor element is provided and, if desired, also a temperature measuring resistance for regulating the temperature produced by a heating resistor. Conducting paths are located on the connecting strips between the middle region and the outer region of the carrier for connecting a sensor element and its heater to circuits on the outer region of the carrier plate.

Hot gas sensor device with improved thermal isolation from carrier plate

Device for measuring a flowing air quantity

A fast-responding temperature sensor, for measuring temperature of a medium, features a resistance element (12) formed as a film on an insulating substrate (10). The resistance element is disposed in a bubble or dome (11) of ceramic, preferably glass ceramic, which is formed on, and bowed with respect to, the insulating substrate (10).

Temperature sensor

Acceleration pick-up

A support for sensor elements, especially temperature, throughflow or chemical sensors, comprises a supporting element composed of a ceramic material and having at least one throughgoing opening, a thin ceramic foil arranged on the supporting element so as to cover the opening to support a sensor element in the region of the opening.

Support for sensors, and sensor provided therewith

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Reutlingen, Germany

Botho Ziegenbein