Semes Co., Ltd.

Samsung Display Co., Ltd.

Boramchan Sung

Eonseok Lee

Dongjin Lee

Daesung Kim

Dongyun Lee

Myungjin Kim

An apparatus for supplying chemical liquid may include a gantry, a chemical liquid supply member providing a chemical liquid onto a substrate, and a moving device supporting the chemical liquid supply member and moving along the gantry. The moving device may include a moving member, load supporting members and absorbing members. The moving member may support one side of the chemical liquid supply member and may run over the gantry. The moving member may cover an upper face, a first side and a second side of the gantry. The load supporting members may support a load applied to the moving member and the gantry while maintaining a substantially constant distance between the moving member and the gantry. The absorbing members may absorb an impulsive load or an impulsive force applied to the moving member and/or the gantry when the moving member deviates from a moving path provided by the gantry.

Moving device and apparatus for supplying chemical liquid having a moving device

An apparatus for processing a substrate may include a stage on which a substrate is placed, an ink jet head assembly for discharging chemical liquid onto the substrate, and a gantry for holding the ink jet head assembly over the substrate on the stage. The ink jet head assembly may include an ink jet head for discharging the chemical liquid onto the substrate, a supporting member for holding the ink jet head, a fixing member being combined with supporting member to fix the supporting member to the fixing member, a protruding member disposed on the fixing member, and a receiving member provided in the supporting member to receive the protruding member.

Ink jet head assembly and apparatus for processing a substrate

A chemical liquid supply assembly may include a chemical liquid supply line for providing chemical liquid to ink jet heads. The chemical liquid supply assembly may include a main line having a first diameter and extending in a first direction, branched lines divided from the main line in a second direction perpendicular to the first direction and connected to the ink jet heads, each of the branched line having a second diameter smaller than the first diameter, and a discharge line connected to one end portion of the main line such that bubbles generated in the chemical liquid supply line are discharged out of the chemical liquid supply line while the chemical liquid supply assembly provides the chemical liquid to the ink jet heads.

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Anyang-si, South Korea

Boramchan Sung