Siltron, Inc.

Lg Siltron Incorporated

Bong-Woo Kim

Jin-Woo Ahn

II-Soo Choi

Eun-Suck Choi

Hwan-Su Yu

Do-Yeon Kim

Jae-Hwan Yi

Provided is an ingot growing apparatus, which includes a crucible containing a silicon melt, a pulling device pulling a silicon single crystal ingot grown from the silicon melt, and a dopant supply unit disposed adjacent to the pulling device and for supplying a dopant during growing of the ingot. The neck portion may be doped at a concentration higher than that of the ingot through the dopant supply unit. Therefore, dislocation propagation velocity may be decreased and a propagation length may be shortened.

Dopant feeder of ignot growing apparatus

A wafer unloading system and wafer processing equipment (system) including the same are disclosed. The wafer unloading system includes a fluid supply tube for supplying a fluid, a nozzle for injecting the supplied fluid, and an injection hole defined in a plate to allow the injected fluid to reach a space between a polishing pad and a wafer.

Wafer unloading system and wafer processing equipment including the same

Growing community of inventors

Gyeongbuk, South Korea

Bong-Woo Kim