Samsung Electronics Co., Ltd.

Bong Su Cho

Chan Hoon Park

Hyun Tai Kang

Kyoung Shik Jun

Young Ho Jei

Yil Seug Park

Jae Won Hwang

In a method for controlling a processing apparatus, an error value between an input value of the processing apparatus for processing a subject to be processed, and a measurement value obtained by measuring the subject being processed is obtained. A correction value is computed for correcting the input value of the processing apparatus in the direction of decreasing the error value, and the values are managed as processing data to be utilized in computing a next correction value. Previous processing data having a history identical to that of the subject loaded to the processing apparatus is searched, and a current bias correction value is predicted from a plurality of most recent correction values having the identical history. Also, a current random correction value is predicted by means of a neural network on the basis of a plurality of most recent random correction values. The predicted bias correction value is summed with the random correction value as a current correction value of the processing apparatus.

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Gyeonggi-do, South Korea

Bong Su Cho