Samsung Electronics Co., Ltd.

Bon-rip Koo

Dae-Woo Kim

Sang-woon Kim

Jae-kyung Lee

A leakage gas detector for a semiconductor device includes a plurality of inflow apertures into which leakage gas flows. A detector sequentially detects the leakage gas in each of the inflow apertures via a plurality of valves, so as to leak test each of the plurality of inflow apertures for presence of possible leakage gas. Each of the plurality of valves are connected to corresponding of the plurality of inflow apertures to control the suction of the leakage gas into the detector. A controller selectively opens and closes each of the plurality of valves.

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Suwon, South Korea

Bon-rip Koo