Applied Materials, Inc.

Bojenna Keating

Samer Banna

Imad Yousif

Vladimir Knyazik

Kyle Tantiwong

Yan Rozenzon

A gas distribution hub for a plasma chamber. The hub has a nozzle including a plurality of inner gas injection passage and a plurality of outer gas injection passages. The first plurality of gas injection passages are angularly spaced-apart arcuate channels at a first radial distance from a center of the hub, and the second plurality of gas injection passages are angularly spaced apart arcuate channels at a different second radial distance from the center of the hub.

Gas hub for plasma reactor

An annular lid plate of a plasma reactor has upper and lower layers of gas distribution channels distributing gas along equal length paths from gas supply lines to respective gas distribution passages of a ceiling gas nozzle.

Plasma reactor with highly symmetrical four-fold gas injection

A gas injection system includes (a) a side gas plenum, (b) a plurality of N gas inlets coupled to said side gas plenum, (c) plural side gas outlets extending radially inwardly from said plenum, (d) an N-way gas flow ratio controller having N outputs coupled to said N gas inlets respectively, and (e) an M-way gas flow ratio controller having M outputs, respective ones of said M outputs coupled to said tunable gas nozzle and a gas input of said N-way gas flow ratio controller.

Nozzle for multi-zone gas injection assembly

Side gas injection kit for multi-zone gas injection assembly

Multi-zone gas injection assembly with azimuthal and radial distribution control

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Palo Alto, CA, United States of America

Bojenna Keating