Taiwan Semiconductor Manufacturing Comp. Ltd.

Raylios Technology Inc.

Bo-Sen Chang

Tseng Chin Lo

Chih-Ting Sun

Molly Chang

Ya-Wen Tseng

Geng-He Lin

Zi-Kuan Li

Kung-Cheng Lin

Yueh-Yi Chen

Ying-Jung Chen

Meng Lin Chang

Kuen-Yu Tsai

Wei-Jhih Hsieh

Zong-En Yu

Hoi-Yu Tong

Tung-Lung Lai

Sheng-Chao Huang

Integrated circuits and methods for overlap measure are provided. In an embodiment, an integrated circuit includes a plurality of functional cells including at least one gap disposed adjacent to at least one functional cell of the plurality of functional cells and a first overlay test pattern cell disposed within the at least one gap, wherein the first overlay test pattern cell includes a first number of patterns disposed along a first direction at a first pitch. The first pitch is smaller than a smallest wavelength on a full spectrum of humanly visible lights.

Method of measuring mask overlay using test patterns

Provided is a method for inserting a pre-designed filler cell, as a replacement to a standard filler cell, including identifying at least one gap among a plurality of functional cells. In some embodiments, a pre-designed filler cell is inserted within the at least one gap. By way of example, the pre-designed filler cell includes a layout design having a pattern associated with a particular failure mode. In various embodiments, a layer is patterned on a semiconductor substrate such that the pattern of the layout design is transferred to the layer on the semiconductor substrate. Thereafter, the patterned layer is inspected using an electron beam (e-beam) inspection process.

Integrated circuit filler and method thereof

Integrated circuit overlay test patterns and method thereof

The present invention provides a method for applying cloud-based time-lapse imaging systems. The method comprises a step for an camera device to receive a recording command, a step for the camera device to obtain a start time, an end time, and a time interval from the recording command, a step for the camera device to capture and upload still images to a cloud-based server at the time interval, a step for the cloud-based server to transfer the still images to a display device, and a step for the display device to present the still images as a time-lapse video.

Method for applying cloud-based time-lapse imaging systems

The present disclosure involves a method. The method includes decomposing a layout of a circuit into a plurality of patterns. The method includes generating a plurality of contours to represent the plurality of patterns after the patterns have been subjected to a manufacturing process. The method includes generating a plurality of polygons that approximate geometries of the contours, respectively. The method includes associating each of the polygons with a respective one of a plurality of pattern elements in a pattern library, wherein the pattern elements each include a shape that resembles the associated polygon and electrical parameters extracted from the shape. The method includes calculating electrical performance of the circuit based on the pattern elements associated with the polygons.

Method for improving accuracy of parasitics extraction considering sub-wavelength lithography effects

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Taipei, Taiwan

Bo-Sen Chang