Globalfoundries U.S. Inc.

Globalfoundries Inc.

Bo Peng

Yusheng Bian

Ajey Poovannummoottil Jacob

Michal Rakowski

Andreas Daniel Stricker

Karen A Nummy

Kenneth John Giewont

Hanyi Ding

Benjamin V Fasano

Kevin K Dezfulian

Siva P Adusumilli

Roderick Alan Augur

Thomas F Houghton

Zhuojie Wu

Abu Thomas

Tymon Barwicz

Shuren Hu

Francis Afzal

Asli Sahin

David B Riggs

The present disclosure generally relates to semiconductor devices for use in optoelectronic/photonic applications and integrated circuit (IC) chips. More particularly, the present disclosure relates to semiconductor devices having a reflector and a photonic component and a method of forming the same. The present disclosure provides a semiconductor device having a substrate, a photonic component arranged above the substrate, a bottom reflector arranged above the substrate and positioned below the photonic component, in which the bottom reflector has a plurality of grating structures configured to reflect electromagnetic waves towards the photonic component, and a top reflector arranged above the photonic component, in which the top reflector has a plurality of grating structures configured to reflect electromagnetic waves towards the photonic component.

Photonic devices integrated with reflectors

Optical coupler structures include a waveguide having waveguide metamaterial segments aligned along a first line. A second insulator is on the first insulator and the waveguide metamaterial segments. A coupler structure is in the second insulator and has coupler metamaterial segments aligned along a second line. The first line and the second line are parallel and within a plane. A portion of the waveguide overlaps a portion of the coupler structure. The waveguide metamaterial segments intersect the plane and have first widths perpendicular to the plane, and the first widths have a first taper along the first line. The coupler metamaterial segments intersect the plane and have second widths in the direction perpendicular to the plane. The second widths have a second taper along the second line that is different from the first taper of the first widths where the waveguide overlaps the coupler structure.

Optical fiber coupler having hybrid tapered waveguide segments and metamaterial segments

Embodiments of the disclosure provide an integrated circuit (IC) structure, including an absorber layer separated from an optical grating coupler by a cladding material. The absorber is positioned to receive light reoriented through the optical grating coupler.

Integrated circuit structure with optical absorber layer over optical grating coupler

Structures for a photonics chip, testing methods for a photonics chip, and methods of forming a structure for a photonics chip. A photonics chip includes a first waveguide, a second waveguide, an optical tap coupling the first waveguide to the second waveguide, and a photodetector coupled to the second waveguide. A laser is attached to the photonics chip. The laser is configured to generate laser light directed by the first waveguide to the optical tap.

Wafer-level testing of lasers attached to photonics chips

One illustrative backscattering generator disclosed herein includes a low-reflection waveguide structure, a slot waveguide structure comprising a first waveguide, a second waveguide and a slot located between the first waveguide and the second waveguide, and a variable direction coupler operatively coupled to the low-reflection waveguide structure and the slot waveguide structure.

Distributed backscattering generator and monitor for laser performance characterization

The present disclosure relates to semiconductor structures and, more particularly, to grating couplers integrated with one or more airgap and methods of manufacture. The structure includes: a substrate material comprising one or more airgaps; and a grating coupler disposed over the substrate material and the one or more airgaps.

Grating couplers integrated with one or more airgaps

Structures for an optical coupler and methods of fabricating a structure for an optical coupler. A coupling section has a plurality of segments arranged with a pitch, a first waveguide core has a section extending longitudinally over the first plurality of segments of the coupling section, and a second waveguide core has a section extending longitudinally over the coupling section. The section of the second waveguide core laterally spaced from the section of the first waveguide core by a given distance.

Optical couplers with segmented waveguides

Structures including an edge coupler and methods of fabricating a structure including an edge coupler. The edge coupler includes a waveguide core, and a shaped layer is positioned over a portion of the waveguide core. The waveguide core is comprised of a first material, and the shaped layer is comprised of a second material different in composition from the first material. The first material may be, for example, single-crystal silicon, and the second material may be, for example, silicon nitride.

Edge couplers with stacked layering

Embodiments of the disclosure provide an integrated circuit (IC) structure, including an optical medium for light signals; and an optical grating coupler coupled to the optical medium. The optical grating coupler is configured to reorient light from the optical medium. A cladding material is over the optical grating coupler. An absorber layer is over the cladding material, and vertically above the optical grating coupler.

Structures for a polarizer and methods of forming a structure for a polarizer. A first slotted waveguide component is positioned over a first waveguide core, and a second slotted waveguide component positioned over the first slotted waveguide component. The first slotted waveguide component includes a second waveguide core and a third waveguide core separated by a first slot, and the second slotted waveguide component includes a fourth waveguide core and a fifth waveguide core separated by a second slot. The first waveguide core is laterally aligned with the first slot and the second slot.

Polarizers with multiple stacked layers

The present disclosure relates to semiconductor structures and, more particularly, to Waveguide absorbers and methods of manufacture are provided. The waveguide structure includes a photonics component and a spirally configured waveguide absorber coupled to a node of the photonics component which reduces optical return loss.

Waveguide absorbers

Structures including a grating coupler and methods of fabricating such structures. The structure includes a waveguide core, a bend, and a grating coupler coupled to the waveguide core by the bend. The grating coupler includes grating structures that are positioned with a spaced relationship in a layer stack above the bend.

Non-planar grating couplers for antennas

Optical coupler structures include a waveguide having waveguide metamaterial segments aligned along a first line. A second insulator is on the first insulator and the waveguide metamaterial segments. A coupler structure is in the second insulator and has coupler metamaterial segments aligned along a second line. The first line and the second line are parallel and within a plane. A portion of the waveguide overlaps a portion of the coupler structure. The waveguide metamaterial segments intersect the plane and have first widths perpendicular to the plane, and the first widths have a first taper along the first line. The coupler metamaterial segments intersect the plane and have second widths in the direction perpendicular to the plane. The second widths have a second taper along the second line that is different from the first taper of the first widths where the waveguide overlaps the second coupler structure.

Growing community of inventors

Wappingers Falls, NY, United States of America

Bo Peng