Samsung Electronics Co., Ltd.

Bo-Bae Kang

Young-Hoon Park

Won-je Park

Dae-cheol Seong

Ui-Sik Kim

Yeo-Ju Yoon

In a method of manufacturing a CMOS image sensor, a P type epitaxial layer is formed on an N type substrate. A deep Ptype well layer is formed in the P type epitaxial layer. An N type deep guardring well is formed in a photodiode guardring region. The N type deep guardring region makes contact with the N type substrate and also be connected with an operational voltage terminal. A triple well is formed in a photodiode region and a peripheral circuit region. The triple well is used for forming a PMOS and an NMOS having different operational voltages. An isolation region is formed in the photodiode region. The isolation region in the photodiode region has a depth different from a depth of an isolation region in the peripheral circuit region.

CMOS image sensor having a crosstalk prevention structure and method of manufacturing the same

Complementary metal-oxide semiconductor (CMOS) image sensors (CIS) and methods of manufacturing the same are provided, the sensors include an epitaxial layer on a substrate in which a first, second, third and fourth region are defined. A photodiode may be formed at an upper portion of the epitaxial layer in the first region. A plurality of gate structures may be formed on the epitaxial layer in the second, third and fourth regions. A first blocking layer may be formed on the gate structures and the epitaxial layer in the first and second regions. A first impurity layer may be formed at an upper portion of the epitaxial layer adjacent to the gate structures in the second region, and a second impurity layer at upper portions of the epitaxial layer adjacent to the gate structures in the third and fourth regions. A color filter layer may be formed over the photodiode. A microlens may be formed on the color filter layer.

CMOS image sensors

Methods of manufacturing CMOS image sensors

Growing community of inventors

Yongin-si, South Korea

Bo-Bae Kang