Texas Instruments Corporation

Blake Ryan Pasker

Binghua Hu

Xinfen Chen

Bill Alan Wofford

Salvatore Frank Pavone

Michael LeRoy Huber

George Nicholas Harakas

James Wayne Klawinsky

Courtney Michael Hazelton

Gregory Lee Hendy

Evelyn Anne Lafferty

A capacitor () is disclosed that is formed as part of an integrated circuit (IC) fabrication process. The capacitor () has conductive top and bottom electrodes () and a nonconductive capacitor dielectric (). In one example, the dielectric () includes first and second thin dielectric layers () that sandwich a layer of antireflective material (). The thin layers () provide the dielectric behavior necessary for the capacitor while the antireflective layer () promotes reduced feature sizes by mitigating reflected standing waves, among other things.

Integrated circuit capacitor having antireflective dielectric

A capacitor is disclosed that is formed as part of an integrated circuit (IC) fabrication process. The capacitor generally comprises a top conductive plate, a capacitor dielectric and a bottom conductive plate that respectively comprise a patterned layer of tantalum nitride TaN, a layer of a nitride based material and a layer of patterned polysilicon.

TaN integrated circuit (IC) capacitor

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Wylie, TX, United States of America

Blake Ryan Pasker