Siemens Aktiengesellschaft

Björn Österreicher

Roland Schmidt

Clemens Fiebiger

Manfred Apel

Wolfgang Hennig

The present embodiments relate to a beam head including a vacuum housing, in which an electron source is arranged. The beam head also includes a beam finger that is connected to the vacuum housing and has an outlet window at a distal end. The beam head includes a transformer housing, in which a transformer connected to the electron source is arranged. The transformer housing is arranged directly on the vacuum housing.

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Saalfeld, Germany

Björn Österreicher