Taiwan Semiconductor Manufacturing Comp. Ltd.

Birgie Kuo

Chien-Wei Wang

Chih-Chien Chang

Chien-Fei Cheng

Chang-Hsi Lin

Shiaw-Lin Chi

Kun-Chi Liu

Fang-Ni Wu

Yi-Fang Su

Lieh-Jung Chen

A manufacturing management system and method. The system includes a manufacturing execution system and a plurality of manufacturing sites coupled to the manufacturing execution system. The manufacturing execution system comprises management data to support the manufacturing sites. Each manufacturing site comprises a corresponding site attribute. At least one of the manufacturing sites receives a lot, queries the management data for the lot from the manufacturing execution system according to lot identification and the site attribute of the manufacturing site receiving the lot, and processes the lot accordingly.

Manufacturing management system and method

A software mechanism is provided for inter-fab mask process management. The mechanism is used for tracking and managing a plurality of lithographic masks through a semiconductor manufacturing environment. A virtual fab is established with a plurality of entities, each entity associated with an internal process to a semiconductor fab or an external process to the semiconductor fab. A state diagram tracks the plurality of lithographic masks through the plurality of entities of the virtual fab. Each of the plurality of lithographic masks is placed at a pre-determined state of the state diagram and a future location for each of the masks in the virtual fab is determined via the state diagram.

Mechanism for inter-fab mask process management

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Yung Kang, Taiwan

Birgie Kuo