Zhejiang University

Bingfeng Ju

Wule Zhu

Anyu Sun

Yuanliu Chen

Fang Han

Xiang Zhao

Bingchun Jia

Kaimin Guan

Sidong Wu

Weijian Zhang

Qi Sun

Wei Gao

Jingyuan Wang

Caoyang Xue

Huilin Du

Jian Chen

Li Zheng

Xiaoyu Yang

Wenhao Zhang

Ye Tao

Peng Hu

Chuanyong Wang

Zhenyang Yu

Yike Zeng

Zeqing Sun

Haoze Zhong

Zhihong Li

Lu Wu

A device for multi-energy field induced atomic-scale CNC machining in an environmental atmosphere comprises an electromagnetic shielding chamber and a control mechanism, wherein an environmental chamber is arranged in the electromagnetic shielding chamber, a workpiece platform is arranged at the bottom of the environmental chamber, and a nanotool driven by a nanotool actuator is arranged at the top of the environmental chamber, and a gas inlet and a gas outlet which are connected to the environmental chamber are formed in the electromagnetic shielding chamber; and the control mechanism is used for controlling the workpiece platform and the nanotool actuator and applying energy fields including a force field, a temperature field, an electric field, an optical field and a magnetic field. The device has the advantages of atomic precision, high efficiency, low cost and good universality.

Device and method for multi-energy field induced atomic-scale computer numerical control (CNC) machining in environmental atmosphere

A photoelectric fluid field cluster catalytic method for atomic-scale deterministic processing, comprises the following steps: selecting nanoparticles with photocatalytic activity as a photocatalytic medium, and using a photoreduction method to realize the precipitation of metal nanoparticles on a surface of the photocatalytic medium, thus creating photoelectrocatalytic clusters; illuminating a coupling area between a surface to be processed of a workpiece, the photoelectrocatalytic clusters and a flexible tool with a catalytic light source, and simultaneously applying a bias voltage to a conductive tray of the workpiece; and applying a normal load to a flexible tool head and setting a rotation speed to generate a hydrodynamic pressure to drive a polishing solution to flow, thus enabling controllable removal with atomic-level precision. The disclosure utilizes the metal particles in the photoelectrocatalytic clusters to capture photogenerated electrons, thereby prolonging the lifetime of photogenerated carriers.

Photoelectric fluid field cluster catalytic method for atomic-scale deterministic processing

Disclosed are a self-adaptive all-fiber laser ultrasonic measuring instrument and a measuring method thereof. The output light of a narrow-linewidth semiconductor fiber laser is split by a polarization controller and a polarization beam splitter to generate detection light and reference light. The detection light and visible light output by an indication laser are irradiated, through a wavelength division multiplexer and a biaxial scanning galvanometer, to a sample under test to generate ultrasonic vibration. The scattered light modulated by the ultrasonic vibration is converged and collected as signal light. The signal light and the reference light are respectively input into an interferometer from two ends of the interferometer in opposite propagation directions. The reference light demodulated by the interferometer generates a feedback control signal for adjusting the measurement performance of the interferometer. The signal light demodulated by the interferometer generates an ultrasonic signal to achieve ultrasonic measurement of the sample.

Self-adaptive all-fiber laser ultrasonic measuring instrument

The present invention provides an electromagnetically driven fast tool servo system based on a flexible hinge combination mechanism, including a base, a voice coil motor arranged in the base, a tool mounting base connected to a coil of the voice coil motor by a first connecting portion, and a grating measurement device connected to the first connecting portion by a guide shaft arranged at a center of the voice coil motor, where the first connecting portion includes a first flexible hinge, a second flexible hinge, a first connecting member located between the first flexible hinge and the second flexible hinge, and a second connecting member located between the second flexible hinge and the coil of the voice coil motor; the tool mounting base, the first flexible hinge, the first connecting member, the second flexible hinge, the second connecting member, and an end of the guide shaft are coaxially connected in series by a first horizontal screw; the first flexible hinge and the second flexible hinge have sheet-like cross structures with the same shape, with end portions of cross arms fixedly connected to the base. In the present invention, axial and lateral precision of the system in a machining process is improved.

Electromagnetically driven fast tool servo system based on flexible hinge combination mechanism

A floating non-contact ultrasonic enhanced flexible sub-aperture polishing device and method are disclosed, an X-axis moving platform, a Y-axis moving platform, a Z-axis moving platform and a workpiece swinging platform in linkage control ensure normal lines of a tool and a workpiece are kept at an identical angle to realize sub-aperture processing; the ventilation main shaft acts air pressure on the ball spline's end portion to form an axial thrust to let the tool axially float; a dynamic balance among hydrodynamic pressure, air pressure and dynamic pressure is performed on the polishing liquid by rotation of the flexible tool; a tiny gap between the tool and workpiece is formed by elastic deformation of the flexible tool due to the dynamic pressure; a shearing force for removing materials is generated when the polishing liquid flows through the gap; a cavitation effect in the gap is formed by ultrasonic waves.

Floating non-contact ultrasonic enhanced flexible sub-aperture polishing device and method

Disclosed are a device and method for detecting a subsurface defect of an optical component. According to the device and method, a spectral confocal technology, a laser scattering technology and a laser-induced ultrasonic technology are combined, excitation laser and detection laser are simultaneously focused to different depths of the optical component through a dispersion lens set, the excitation laser generates a transient thermal expansion effect on a subsurface of the optical component, the detection laser is used for observing and analyzing ultrasonic vibration of the subsurface defect under an action of the thermal expansion effect, and spatial distribution information and scattered spectral information of scattered light at a position of the subsurface defect are acquired by the spectral confocal technology. The device and method are suitable for nondestructive testing of a finished product of an ultra-precise optical component with a strict requirement on the subsurface defect.

Device and method for detecting subsurface defect of optical component

Disclosed are methods and devices for simultaneously detecting surface shapes and thickness distribution of inner and outer walls of a thin-walled rotating body. According to the invention, a chromatic confocal senor head is driven by a bottom rotary table, a main measuring head rotary table and a linear motion shaft mover to perform copy scanning along a surface of a thin-walled shell-type rotating body, so that the detection of the surface shapes and thickness distribution of the inner and outer walls of the thin-walled shell-type rotating body can be realized at the same time. By the method, mechanical interference caused by arranging a measuring head in the thin-walled shell-type rotating body can be avoided, and coordinate consistency of surface shape measurement data and thickness distribution data of the inner and outer walls in a three-dimensional space can be ensured, thus ensuring the overall measurement precision; and meanwhile.

Method and device for simultaneously detecting surface shapes and thickness distribution of inner and outer walls of thin-wall rotating body

A device and a method for simultaneously inspecting defects of a surface and a subsurface of an optical element are provided. Combined with laser-induced ultrasound and laser scattering inspection technologies, through generating acoustic sound waves on the surface and the subsurface of the optical element to be tested by lasers, a static light scattering effect of subsurface defects under modulation of the acoustic sound wave is observed and analyzed; through analyzing amplitude and phase changes of scattered light intensity and reflected light intensity, inspection for the defects of the surface and the subsurface of the optical element is realized. The present invention can be applied in quality inspection of precise optical elements, especially in finished product inspection of ultra-precise optical elements having strict requirements on the subsurface defects.

Device and method for simultaneously inspecting defects of surface and subsurface of optical element

Growing community of inventors

Zhejiang, China

Bingfeng Ju