Shanghai Micro Electronics Equipment (group) Co., Ltd.

Abb Schweiz Ag

Entit Software LLC

Tongji University

Shanghai Micro Electronics Equipment Co., Ltd.

Bing Xu

Chang Jin Zhou

Zhiyong Yang

Yuzhi Li

Bin Liu

Jing Wu

Kaiyuan Cao

Hui Yu

Yariv Snapir

Chungang Yan

Zhijun Ding

Changjun Jiang

Hongzhong Chen

Leonid Reznik

Yuefei Chen

Xiang Jia

Said Zahrai

Gad Sakin

Xiaoqing Yang

Heng Xie

Wen Lin

An optical measurement device includes: a deformation measurement device for measuring magnitude of deformation of an optical detection platform frame, and a correction module for correcting the position of a substrate carrier and/or the position of an optical detection device according to the magnitude of deformation of the optical detection platform frame, so as to eliminate an error in measurement of mark positions due to deformation of the frame. An optical measurement method is also disclosed.

Optical measurement device and method

An optical measurement device and method are disclosed. A position measurement device is provided with a device for measuring inclinations of an optical detection module () and a substrate carrier () which are measured during movement of the optical detection unit and the substrate carrier. Calculation and correction can be made according to the inclination data and with reference to displacements of the optical detection module () and the substrate carrier () and coordinates of their positions. During measurement for a certain point on the substrate, measured data related to the point is corrected by using the device and the method, which improves measurement precision, thus eliminating a large error caused in measurement for a large-sized substrate ().

Optical measurement device and method with improved measurement precision

A method for mining user cyclic patterns comprises steps: S: a user behavior recording module recording time of behaviors of each user; S: a user behavior time sequence generation module performing batch processing to the behaviors of each user to generate a time sequence of the behaviors of the user by using day as time granularity; and S: a user behavior cyclic pattern acquisition module generating time sequence cyclic patterns from the time sequence according to frequent patterns.

System and method for mining user cycle mode

Industrial robot

Pre-populating a form can include receiving a first input that describes a problem from a first user. Pre-populating a form can include associating a category with the first input. Pre-populating a form can include selecting a first form based on the category. Pre-populating a form can include pre-populate the first form based on a second input provided by a second user to a second form belonging to the category.

Pre-populating a form

A backside alignment apparatus and method for determining a position relationship between a substrate () and a workpiece stage (). The backside alignment apparatus includes: an illumination apparatus () for emanating infrared light; a workpiece stage assembly () for supporting and moving the substrate (); an imaging apparatus () for detecting alignment marks and calculating positions of the alignment marks, the alignment marks including a reference plate alignment mark () and a backside alignment mark (); and a reference plate assembly () for setting up a relationship between position coordinates of the imaging apparatus () and the workpiece stage assembly (). The illumination apparatus () and the imaging apparatus () are able to illuminate and align different alignment marks using only one set of illumination apparatus.

Backside alignment apparatus and method

Growing community of inventors

Shanghai, China

Bing Xu