Tokyo Electron Limited

Agency for Science, Technology and Research

Bin Zhao

Kazuki Narishige

Yuanjin Zheng

Chiew Wah Yap

Xin Liu

Seiichi Watanabe

Kenji Komatsu

Takehito Watanabe

Koji Kawamura

Dali Liu

Jianfeng Xu

Wee Teck Tan

Yi Hao Ng

Zhenkang Max Liang

Li Jin

Xinhe Jerry Lim

Yujun Nicholas Loo

Myint Wai Phyu

Chai Jin Chua

A substrate processing method performed in a chamber of a substrate processing apparatus is provided. The chamber includes a substrate support, an upper electrode, and a gas supply port. The substrate processing method includes (a) providing the substrate on the substrate support; (b) supplying a first processing gas into the chamber; (c) continuously supplying an RF signal into the chamber while continuously supplying a negative DC voltage to the upper electrode, to generate plasma from the first processing gas in the chamber; and (d) supplying a pulsed RF signal while continuously supplying the negative DC voltage to the upper electrode, to generate plasma from the first processing gas in the chamber. The process further includes repeating alternately repeating the steps (c) and (d), and a time for performing the step (c) once is 30 second or shorter.

Substrate processing method and substrate processing apparatus

An electrocardiogram signal processing system is provided which includes: a wavelet transformation unit comprising a plurality of outputs, each output being connected to one of a plurality of scales, wherein the wavelet transformation unit is adapted to transform an input electrocardiogram signal into a set of wavelets, each wavelet being output to one of the scales; a plurality of signal processing blocks, each of the signal processing blocks coupled to a respective output of the wavelet transformation unit and configured to receive and process the wavelet from the respective output, wherein the signal processing blocks provide processing functions which differ from one another.

Electrocardiogram signal processing system

Growing community of inventors

Singapore, Singapore

Bin Zhao