Applied Materials, Inc.

Hitachi Global Storage Technologies Netherlands B.v.

Bin V Cao

Mei Yin Chang

Wen-Chien David Hsiao

Avgerinos V Gelatos

Dien-Yeh Wu

Hung-Chin Guthrie

Jyh-Shuey Jerry Lo

Xiaoxiong Yuan

Yu Wen Chang

Kazuya Daito

Joel M Huston

Takashi Kuratomi

Faruk Gungor

Apparatus for processing a substrate are provided herein. In some embodiments a showerhead assembly includes a gas distribution plate having a plurality of apertures; a holder having a wall, an radially inwardly extending flange extending from a lower portion of the wall and coupled to the gas distribution plate, and a radially outwardly extending flange extending from an upper portion of the wall, wherein the wall has a thickness between about 0.015 inches and about 0.2 inches; and a heating apparatus disposed above and spaced apart from the gas distribution plate, wherein the heating apparatus includes a heater configured to heat the gas distribution plate.

Substrate processing chamber having heated showerhead assembly

A magnetic write head and method of manufacture thereof that has a first pole structure having a step notched first pole structure. The step notched structure includes a bottom notched portion that is wider than the second notched portion formed thereover. The upper, or narrower, notched portion has a width that is substantially equal to and self aligned with a second pole structure (P2) formed thereover. The invention may also include first and second wing portions formed in the first pole that are recessed from the ABS and that extend laterally from the first notched portions of the first pole. The formation of the winged portions is assisted by an ion mill resistant bump (alumina bump) formed thereover, which acts as a mask during the ion milling operations that are used to form the first and second notches.

Magnetic write head having a first magnetic pole with a self aligned stepped notch

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Fremont, CA, United States of America

Bin V Cao