Huazhong University of Science and Technology

Bin Shan

Jing Zhang

Chenlong Duan

Rong Chen

Kai Qu

Jiawei Li

Weiming Ba

Xiao Liu

Penghui Zhu

An atomic layer deposition device for massively coating micro-nano particles, includes a reaction chamber and a particle container, in which an inlet port is provided at a lower end of the reaction chamber, and an inlet pipe for introducing a precursor or a carrier gas is provided in the inlet port; a chamber door is provided at an upper end of the reaction chamber, so that the particle container can be freely placed in or removed out of the reaction chamber; an air inlet hole is provided at a lower end of the particle container, and the inlet pipe enters the particle container through the air inlet hole.

Atomic layer deposition device for massively coating micro-nano particles

Growing community of inventors

Hubei, China

Bin Shan