Alis Corporation

Carl Zeiss Microscopy Gmbh

Micrion Corporation

Varian Associates, Inc.

Carl Zeiss Nts Gmbh

Micrion Limited Partnership

Fei Comapny

Alis Technology Corporation

Fsi Company

Billy W Ward

John Anthony Notte, Iv

Randall G Percival

Louis S Farkas, Iii

Raymond Hill

Lars Markwort

Dirk Aderhold

Ulrich Mantz

Klaus Edinger

Alexander Groholski

Charles J Libby

Richard A Comunale

John A Notte

David Edwards, Jr

Donald Wayne Berrian

Lawrence Scipioni

Colin Sanford

Mark D DiManna

Michael Steigerwald

David C Shaver

Shawn McVey

Johannes Bihr

Nicholas Guarino

Lewis A Stern

William D Wells

Robert A Casella

William DiNatale

Gabriel Onorio

John A Doherty

Michael L Ward

Lou Farkas

Mark Dimanna

John A Notte Iv

John A Iv Notte

Louis S Farkas Iii

Alexander Ghoholski

Ion sources, systems and methods are disclosed.

Ion sources, systems and methods

In one aspect the invention provides a gas field ion source assembly that includes an ion source in connection with an optical column such that an ion beam generated at the ion source travels through the optical column. The ion source includes an emitter having a width that tapers to a tip comprising a few atoms. In other aspects, the methods provide for manufacturing, maintaining and enhancing the performance of a gas field ion source including sharpening the tip of the ion source in situ.

Systems and methods for a gas field ionization source

In general, in one aspect, the disclosure features a method and system for imaging of samples, for example, imaging samples with charged particles.

Scan method

Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like). In certain embodiments, the ion sources, systems and methods can enhance the ability to make tips having desired physical attributes (e.g., the number of atoms on the apex of the tip). This can enhance performance (e.g., increase reliability, stability and the like).

Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like).

Disclosed are systems and methods for applying a voltage gradient to a gas delivery system, delivering a gas through a length of the gas delivery system having the voltage gradient, the gas having a pressure-distance product of less than about 1&#xd7;10Torr-inches or greater than about 100 Torr-inches, and delivering the gas into a housing of an ion microscope, the housing including an emitter and an extractor.

Gas delivery system with voltage gradient for an ion microscope

Charged particle beams with different charged particle currents are disclosed. In some embodiments, a method includes exposing a sample to a first ion beam having a first ion current at the sample, and exposing the sample to a second ion beam having a second ion current at the sample, where the first ion current is at least two times greater than the second ion current. In certain embodiments, a method includes creating a first ion beam at a first pressure, exposing a sample to the first ion beam, creating a second ion beam at a second pressure, and exposing the sample to the second ion beam, where the first pressure is at least two times greater than the second pressure.

Multiple current charged particle methods

Disclosed herein are methods that include: (a) exposing a sample in a chamber to a first gas, where the first gas reacts with surface contaminants on the sample to form a second gas; (b) removing at least a portion of the second gas from the chamber; and (c) exposing the sample to a charged particle beam to cause a plurality of particles to leave the sample and detecting at least some of the plurality of particles. The charged particle beam can include particles having a molecular weight of 40 atomic mass units or less.

Sample decontamination

In one aspect the invention provides a gas field ion microscope that includes an ion source in connection with an optical column, such that an ion beam generated at the ion source travels through the optical column and impinges on a sample. The ion source includes an emitter having a width that tapers to a tip comprising a few atoms. In other aspects, the invention provides methods for using the ion microscope to analyze samples and enhancing the performance of a gas field ion source.

Systems and methods for a gas field ion microscope

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Merrimac, MA, United States of America

Billy W Ward