Average Co-Inventor Count = 5.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Kla Tencor Corporation (2 from 1,787 patents)
2 patents:
1. 10466596 - System and method for field-by-field overlay process control using measured and estimated field parameters
2. 9466100 - Focus monitoring method using asymmetry embedded imaging target