Texas Instruments Corporation

Globalfoundries Inc.

Massachusetts Institute of Technology

Bichoy Bahr

Baher S Haroun

Juan Alejandro Herbsommer

Argyrios Dellis

Swaminathan Sankaran

Ting-Ta Yen

Benjamin Stassen Cook

Adam Joseph Fruehling

Zoran Krivokapic

Ali Kiaei

Scott Robert Summerfelt

Michael Henderson Perrott

Sachin Kalia

Kaichien Tsai

Jeronimo Segovia Fernandez

Dana Weinstein

Jeronimo Segovia-fernandez

Peter Smeys

Yogesh Kumar Ramadass

Hassan Omar Ali

Tolga Dinc

Arpan Sureshbhai Thakkar

Hakhamanesh Mansoorzare

Wentao Wang

Radhika Marathe

Peeyoosh Mirajkar

Udit Rawat

Zachary Schaffer

Ajay Kumar Reddy

In a described example, an apparatus includes a first substrate having a first side, a second side, and a coupling interface across a portion of the first side. The coupling interface including an arrangement of subwavelength periodic structures formed in the first substrate. A second substrate is coupled to a portion of the second side of the first substrate to form a sealed cavity aligned with the coupling interface.

Coupling interfaces for waveguide structures and methods of fabrication

A circuit includes a resonator, a transistor pair, and a common-mode feedback circuit. The transistor pair is cross-coupled across the resonator. The common-mode feedback circuit is coupled to the transistor pair. The common-mode feedback circuit includes first and second degeneration cells. The second degeneration cell is connected in parallel with the first degeneration cell. The second degeneration cell is configured to switchably vary a current flow through the transistor pair.

BAW resonator based oscillator

An oscillator circuit includes a first BAW oscillator, a first coupling stage, a second BAW oscillator, and a second coupling stage. The first BAW oscillator is configured to generate a first output signal at a frequency. The first coupling stage is coupled to the first BAW oscillator, and is configured to amplify the first output signal. The second BAW oscillator is coupled to the first coupling stage, and is configured to generate a second output signal at the frequency. The second output signal differs in phase from the first output signal. The second coupling stage is coupled to the first BAW oscillator and the second BAW oscillator, and is configured to amplify the second output signal and drive the first BAW oscillator.

Multi-phase oscillators

A micro-mechanical resonator die includes: micro-mechanical resonator die layers; a cavity formed in at least one of the micro-mechanical resonator die layers; and a micro-mechanical resonator suspended in the cavity. The micro-mechanical resonator includes: a base; a first resonator portion extending from the base along a first plane; and a second resonator portion extending from the base along a second plane. The first resonator portion is configured to operate in an out-of-plane flexural mode that displaces at least part of the first resonator portion out of the first plane. The second resonator portion is configured to operate in an out-of-plane flexural mode that displaces at least part of the second resonator portion out of the second plane and out-of-phase relative to the first resonator portion.

Micro-mechanical resonator having out-of-phase and out-of-plane flexural mode resonator portions

In some examples, a package comprises a semiconductor die having a first surface and a second surface opposing the first surface, the semiconductor die including circuitry formed in the first surface. The package includes an acoustic waveguide in the semiconductor die, the acoustic waveguide including an array of capacitors. The array of capacitors includes a transducer portion and a diffraction grating portion. The transducer portion is configured to convert signals between electrical signals and acoustic waves, and the diffraction grating portion is configured to direct the acoustic waves toward and receive the acoustic waves from the second surface.

Acoustic waveguide with diffraction grating

A tunable bulk acoustic wave (BAW) resonator includes: a first electrode adapted to be coupled to an oscillator circuit; a second electrode adapted to be coupled to the oscillator circuit; and a piezoelectric layer between the first electrode and the second electrode; and a Bragg mirror. The Bragg mirror has: a metal layer; and a dielectric layer between the metal layer and either of the first electrode or the second electrode. The tunable BAW resonator also includes: a radio-frequency (RF) signal source having a first end and a second end, the first end coupled to the first electrode, and the second end coupled to the second electrode; and an amplifier circuit between either the first electrode or the second electrode and the Bragg mirror metal layer.

Tunable bulk acoustic wave (BAW) resonator based on application of radio-frequency (RF) signal to Bragg mirror metal layer

A clock circuit includes a voltage-controlled oscillator (VCO) having a control input and a first clock output. The clock circuit includes a frequency-locked loop (FLL) having an FLL input and a control output, the control output coupled to the control input. A microelectromechanical system (MEMS) resonator-based oscillator has a second clock output. A multiplexer has a first multiplexer input, a second multiplexer input, a selection input, and a multiplexer output. The first multiplexer input is coupled to the first clock output. The second multiplexer input is coupled to the second clock output. The multiplexer output is coupled to the FLL input.

Oscillator calibrated to a microelectromechanical system (MEMS) resonator-based oscilator

A system comprises a digital processing circuit, a frequency modulator, an amplitude modulator, and an adder. The digital processing circuit receives an input signal and a correlation signal and generates a frequency tuning parameter and an amplitude modulation parameter. The frequency modulator generates a frequency modulation signal and the correlation signal. The amplitude modulator receives the amplitude modulation parameter and generates an amplitude modulation signal. The adder receives the frequency tuning parameter and the frequency modulation signal and generates a control signal. In some implementations, the system further comprises a DC feedback circuit that receives the input signal and generates a DC compensation signal. In some implementations, the system further comprises a temperature sensor, a temperature compensation circuit, and a second adder.

Methods and systems for atomic clocks with high accuracy and low Allan deviation

An oscillator circuit includes a bulk acoustic wave resonator, a differential active inductor circuit, and a gain circuit. The differential active inductor circuit is configured to bias the bulk acoustic wave resonator. The differential active inductor circuit is coupled between the bulk acoustic wave resonator and a power supply terminal. The gain circuit is coupled to the bulk acoustic wave resonator.

Oscillator with active inductor

An example apparatus includes: a semiconductor substrate; a mechanical resonator supported by the substrate, the mechanical resonator including an array of capacitors; and a plasmonic infrared (IR) absorber including an array of metal structures. The mechanical resonator is between the substrate and the IR absorber.

Methods and apparatus to detect infrared wavelengths using a mechanical resonator with an integrated plasmonic infrared absorber

In an example, a system includes a BAW resonator. The system also includes a first heater configured to heat the BAW resonator, where the first heater is controlled by a first control loop. The system includes a circuit coupled to the BAW resonator. The system also includes a second heater configured to heat the circuit, where the second heater is controlled by a second control loop.

Oven controlled MEMS oscillator with multiple temperature control loops

A temperature compensated oscillator circuit includes a first oscillator, a second oscillator, a first divider, a second divider, a frequency ratio circuit, and a temperature compensation circuit. The first divider is coupled to the first oscillator, and is configured to divide a frequency of a first oscillator signal generated by the first oscillator. The second divider is coupled to the second oscillator, and is configured to divide a frequency of a second oscillator signal generated by the second oscillator. The frequency ratio circuit is coupled to the first divider and the second divider, and is configured to determine a frequency ratio of an output of the first divider to an output of the second divider. The temperature compensation circuit is coupled to the frequency ratio circuit and the first oscillator, and is configured to generate a compensated frequency based on the frequency ratio and the first oscillator signal.

BAW oscillators with dual BAW temperature sensing

A multi-die module includes a first die with a first electronic device and a second die with a second electronic device. The multi-die module also includes a contactless coupler configured to convey signals between the first electronic device and the second electronic device. The multi-die module also includes a coupling loss reduction structure.

Multi-die module with contactless coupler and a coupling loss reduction structure

In described examples, a magnetic sensor includes a waveguide that encapsulates dipolar molecules. A mm-wave electromagnetic field is launched into the waveguide, travels through the dipolar molecules, and is then received after passing through the dipolar molecules. The frequency of the mm-wave electromagnetic signal is swept across a range that includes an intrinsic quantum rotational state transition frequency (Fr) for the dipolar molecules. Absorption peaks in accordance with the Zeeman effect are determined. A strength of a magnetic field affecting the magnetic sensor is proportional to a difference in the frequencies of the absorption peaks.

Millimeter wave magnetic sensor

A reference frequency signal generator comprises a plurality of ovenized reference crystal oscillators (OCXOs) having different turn-over-temperatures, a selector logic circuit coupled to outputs of the OCXOs, a temperature sensor, and a controller coupled to an output of the temperature sensor. The selector logic circuit outputs one of the outputs of the OCXOs based on a control signal from the controller. The controller also generates control signals for the OCXOs. In some implementations, the reference frequency signal generator includes a phase-locked loop or a fractional output divider coupled to the output of the selector logic circuit and configured to receive a calibration signal from the controller.

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Allen, TX, United States of America

Bichoy Bahr