Applied Materials, Inc.

Bibhavendra Singh

Raman K Nurani

Ramachandran Subramanian

Bharath Ram Sundar

Debkalpo Das

A method includes obtaining sensor data associated with a deposition process performed in a process chamber to deposit film on a surface of a substrate. A plurality of physics-based outputs are generated using a transformation function and the sensor data. The transformation function is used to at least one of estimate site availability for growth at an equilibrium condition for the process chamber or estimate boundary layer thickness in an equilibrium condition for the process chamber. The physics-based outputs are mapped to a training set and a virtual model is trained based on the training set and the sensor data. The virtual model is trained to generate predictive metrology data associated with the film.

Systems and methods for predicting film thickness using virtual metrology

A method includes obtaining sensor data associated with a deposition process performed in a process chamber to deposit film on a surface of a substrate. The method further includes generating a plurality of physics based outputs using a transformation function and the sensor data. The method further includes mapping the physics based outputs to a training set. The method further includes training a virtual model based on the training set and the sensor data, wherein the virtual model is trained to generate predictive metrology data associated with the film.

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Lucknow, India

Bibhavendra Singh