Flow Devices and Systems Inc.

Other

Bhushan Somani

Eric J Redemann

Christophe Ellec

Geoffrey Rodney Wong

A mass flow control apparatus is capable of controlling a flow rate of a fluid to a tool. Pressure of the fluid is regulated by a solenoid valve, which receives signals from a control module. Various set points may be inputted to the control module, whereby control module receives pressure sensor signals from across a flow restrictor and adjusts the solenoid valve to control the fluid flow rate to equal a set point.

Systems and methods for flow sensor back pressure adjustment for mass flow controller

A self-correcting pressure-based mass flow control apparatus includes outlet pressure sensing to enable correction for non-ideal operating conditions. Further the mass flow control apparatus having a fluid pathway, a shutoff valve in the fluid pathway, a reference volume in the fluid pathway, a first pressure measuring sensor in fluid communication with the reference volume, a first temperature measuring sensor providing a temperature signal indicative of the fluid temperature within the reference volume, a proportional valve in the fluid pathway, and a second pressure measuring sensor in fluid communication with the fluid pathway.

Apparatus and methods for self-correcting pressure based mass flow controller

A mass flow control apparatus comprising a proportional valve upstream of a flow measurement portion, a pressure sensing element fluidly connected to determine a fluid pressure downstream of the flow measurement portion, and a dynamically adjustable variable valve downstream of the flow measurement portion and adjacent to the pressure sensing element connection. Fluid conductance of the variable valve is adjusted according to a control scheme based upon limitations of the flow measurement portion. Integral flow verification may be enabled with additional fluid pathway elements upstream of the flow measurement portion.

A reference volume for use with pressure change flow rate measurement apparatus has an internal structure comprising elements with cross section and length comparable to the cross section and length of adjacent interstitial fluid regions. The reference volume may have one or more heat conduction elements exterior to and in good thermal contact with a corrosion resistant material that defines the internal fluid holding region.

Systems and methods for reference volume for flow calibration

A system and method including a weighing scale configured to measure a starting weight at a start time of a vaporizer chamber with a vaporizable liquid, the weighing scale configured to measure an ending weight at an end time and a controller configured to determine a vapor flow rate out of the vaporizer chamber based on a difference between the start time and the end time.

Vapor on demand systems and methods

A device that includes a flow controller system that comprises one or more sensors, a flow measurement sensor that comprises one or more sensors. The flow measurement sensor is configured to generate a signal based on determine the difference between the flow as measured by the flow controller system and the flow measurement system in real time.

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Yorba Linda, CA, United States of America

Bhushan Somani