Lam Research Corporation

Bhavin Jariwala

Jon Henri

Nagraj Shankar

Kapu Sirish Reddy

Arpan Pravin Mahorowala

Pengyi Zhang

Elham Mohimi

Methods, systems, and computer programs are presented for selective deposition of etch-stop layers for enhanced patterning during semiconductor manufacturing. One method includes an operation for adding a photo-resist material (M) on top of a base material (M) of a substrate, Mdefining a pattern for etching Min areas where Mis not present above M. The method further includes operations for conformally capping the substrate with an oxide material (M) after adding M, and for gap filling the substrate with filling material Mafter the conformally capping. Further, a stop-etch material (M) is selectively grown on exposed surfaces of Mand not on surfaces of Mafter the gap filling. Additionally, the method includes operations for removing Mfrom the substrate after selectively growing M, and for etching the substrate after removing Mto transfer the pattern into M. Madds etching protection to enable deeper etching into M

Selective deposition of etch-stop layer for enhanced patterning

Methods, systems, and computer programs are presented for selective deposition of etch-stop layers for enhanced patterning during semiconductor manufacturing. One method includes an operation for adding a photo-resist material (M) on top of a base material (M) of a substrate, Mdefining a pattern for etching Min areas where Mis not present above MThe method further includes operations for conformally capping the substrate with an oxide material (M) after adding Mand for gap filling the substrate with filling material Mafter the conformally capping. Further, a stop-etch material (M) is selectively grown on exposed surfaces of Mand not on surfaces of Mafter the gap filling. Additionally, the method includes operations for removing Mfrom the substrate after selectively growing Mand for etching the substrate after removing Mto transfer the pattern into MMadds etching protection to enable deeper etching into M

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Bhavin Jariwala