Carl Zeiss Industrielle Messtechnik Gmbh

Carl-zeiss-stiftung

Cymer, Inc.

Berthold Matzkovits

Palash P Das

Thomas Hofmann

Kurt Brenner

Guenter Grupp

Roland Brenner

Joerg Walther

Klaus-Dieter G&ouml;tz

Ernst Stump

Heinz Broghammer

Michael Hoell

Otto Boucky

A linear guide for a coordinate measuring machine. The linear guide comprises at least one plate-shaped main body and at least one guide rail. The plate-shaped main body has a material with a first coefficient of thermal expansion. The at least one guide rail has a material with a second coefficient of thermal expansion, which differs from the first coefficient of thermal expansion. The guide rail is connected to the plate-shaped main body, and arranged in a neutral axis of the plate-shaped main body.

Linear guide for a coordinate measuring machine, and a coordinate measuring machine

A coordinate measuring apparatus for measuring a workpiece having a workpiece surface includes a sensor to capture the workpiece surface and a mechanism to move the sensor in coordinate directions (x, y, z) relative to the workpiece. The mechanism includes a rigid frame, a mount and measuring skids. The rigid frame includes mutually parallel horizontal longitudinal members having respective horizontal guides. The rigid frame includes vertical supports having respective upper and lower ends. The horizontal longitudinal members are rigidly connected to the upper ends of the vertical supports. The rigid frame includes transverse members oriented transverse to the longitudinal members and being rigidly connected to the lower end of the vertical supports. The transverse members are supported via the mount and a first one of the measuring skids is configured to move the sensor in the coordinate direction (x) along the first and second horizontal guides.

Coordinate measuring apparatus for measuring a workpiece

Systems and methods are disclosed for focusing a beam for an interaction with a film deposited on a substrate wherein the focused beam defines a short axis and a long axis. In one aspect, the system may include a detecting system to analyze light reflected from the film on an image plane to determine whether the beam is focused in the short axis at the film. In still another aspect, a system may be provided for positioning a film (having an imperfect, non-planar surface) for interaction with a shaped line beam.

Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate

A coordinate measuring instrument or machining equipment has a component that is mounted at its one end, movably on two guides, by a component foot. In order to be able to compensate rotation errors of the component, the component foot is arranged such that the component is turned in a plane that is orthogonal to the direction of motion of the component foot when the distance between the guides is changed.

Coordinate measuring instrument or machining equipment

A coordinate measuring machine has a measuring arm on which a collision protector is provided that can be deflected transversely of the longitudinal axis of the measuring arm when the measuring sensor system collides with an object. To operate the coordinate measuring machine with different measuring sensor systems and machining units, the coordinate measuring machine includes an identification unit that automatically identifies the measuring sensor system or machining unit. A securing unit is connected to the identification unit and adjusts the torque required to deflect the collision protector in response to identification of the measuring sensor system or machining unit by the identification unit.

Coordinate measuring machine with collision protection

Growing community of inventors

Gerstetten, Germany

Berthold Matzkovits