Microlas Lasersystem Gmbh

Lambda Physik Forschungs-und Entwicklungsgesellschaft

Innovavent Gmbh

Microlas Lasersystm Gmbh

Berthold Burghardt

Hans-Jurgen Kahlert

Peter Heist

Klaus Brunwinkel

Peter Oesterlin

Ulf Krause

Günter Hollemann

Hans-Jürgen Kahlert

Henning Schmidt

Thomas Gabler

Hans-J&uuml;rgen Kahlert

Uwe Sarbach

A laser system, which is used in material processing to produce a radiation line of small width and uniform high intensity in the longitudinal direction, produces radiation that has different mode numbers Mperpendicular to the propagation direction.

Anamorphotic solid-sate laser

A device is obtained for converting the intensity distribution of a laser beam in particular into an intensity distribution which falls constantly along an axis from one side to the other in that a homogenizer ( ), which mutually superimposes the sub-beams of the laser beam such that when a laser beam with a specific intensity distribution passes through the homogenizer, a homogenization of the intensity distribution of the laser beam is promoted, is combined with at least one inverter ( ) which inverts the intensity distribution of a sub-region, in particular a sub-beam or a plurality of adjacent sub-beams, along at least one axis along which the intensity is to be converted. The extent of the fall in intensity from one side to the other can be controlled by means of the number of the inverters.

DEVICE FOR CONVERTING THE INTENSITY DISTRIBUTION OF A LASER BEAM AND A DEVICE AND METHOD FOR GENERATING A LASER BEAM WITH AN INTENSITY WHICH FALLS CONSTANTLY ALONG AN AXIS FROM ONE SIDE OF THE BEAM TO THE OTHER

An optical apparatus for the homogenization of laser radiation, in particular of an excimer laser, and for the generation of several lighting fields (F1, F2) from this radiation comprises a plurality of acentric lens segments (G1a, G1b, G1c, G1d; G2a, G2b, G2c, G2d). The acentric lens segments are characterized in that they are segments of cylindrical lenses with an axis of symmetry and that the portion of the cylindrical lens which contains the axis of symmetry is not part of the acentric lens segment. Several groups (G1, G2) of acentric cylindrical lens segments are provided, with each group generating a lighting field (F1, F2) of homogeneous energy density. A collecting lens (S) is arranged downstream of the acentric lens segments, which generates the lighting fields (F1, F2) on a work plane (E).

Optical apparatus for the homogenization of laser radiation and the

An optical device is described for generating a sharp illuminating line on an illuminating plane from a high-power laser beam. The sharp illuminating line includes long and short axes. The optical device comprises an anamorphic setup of imaging and homogenizing optical systems for the separate imaging and homogenizing of the laser beam in the directions of the long and short axes. For imaging and homogenizing the laser beam in the direction of the short axes, a slit is illuminated homogeneously and the slit is imaged on the illumination plane by reducing optics.

Optics for forming a sharp illuminating line of a laser beam

An optical device for homogenizing a light beam comprises a plurality of first lenses on which the light beam impinges from one side. At the side on which the light beam impinges the first lenses are convex, while they are prismatic at the opposite side at which the light beam emerges from the lenses. At least one convergent lens is disposed downstream of the lenses mentioned in the direction of the light beam. Instead of giving the first lenses a prismatic configuration it is also possible to make the first lenses plano-convex and arrange second lenses of plano-concave shape downstream of the first lenses in the direction of the light beam.

Device for homogenizing a light beam

For small line width tuning of a laser, especially a pulsed dye laser, a reference beam is uncoupled from the laser resonator (10,18) and directed to a beam position photosensor such as an adjacent pair of photo diodes. A control signal for synchronizing the movements of a grating (10) and an etalon (18) of the laser resonator is derived from a local change of the reference beam in order that synchronism may be achieved in the movement of both the etalon and the grating.

Growing community of inventors

Waake, Germany

Berthold Burghardt