Forschungszentrum Juelich Gmbh

Bert Voigtlaender

Peter Coenen

Vasily Cherepanov

Vasily Cheperanov

A method is provided for electrically examining electronic components of an integrated circuit including a target region to be examined in which electronic components with contact points are located and further including a remaining, non-target region. The method includes performing an examination with a combined SEM/AFM nanoprobe. The examination includes imaging at least a portion of the non-target region with the scanning electron microscope part of the SEM/AFM nanoprobe in a first step, imaging at least a portion of the target region only with the atomic force microscope part of the SEM/AFM nanoprobe in a subsequent step, and recording, in a further subsequent step, current/voltage curves as characteristic electrical curves at the contact points with the nanoprobe, or performing a conductive AFM technique.

Method for electrically examining electronic components of an integrated circuit

Provided is a device comprising at least one tubular piezo element for the electro mechanical positioning of a slider within the piezo element. The device has least one elastic friction means for exerting a normal force on the slider, the friction means being connected to the piezo element. A method for controlling the device is also disclosed.

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Juelich, Germany

Bert Voigtlaender