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Wacker Siltronic Gesellschaft Fur Halbleitermaterialien Ag

Bert Ripper

Holger Lundt

Karl Egglhuber

Christian Andrae

Jochen Greim

Peter Lehfeld

Robert Hofmann

Hubert Grubm&uuml;ller

Helmut K&ouml;lker

A tool and method are provided for the abrasive machining of a substantially planar surface. The tool has a base body and a plurality of elements which are mounted on the base body and form a planar coating which is used as a working coating during machining of the surface.

Tool and method for the abrasive machining of a substantially planar surface

A method is for simultaneously cutting off a multiplicity of wafers from a hard, brittle workpiece which has a longitudinal axis and a peripheral surface. The workpiece is guided, by means of a translational relative movement, directed perpendicular to the longitudinal axis, between the workpiece and a wire web of a wire saw with the aid of a feed device, through the wire web which is formed by a sawing wire. The workpiece is rotated about the longitudinal axis while the wafers are being cut off. There is also a wire saw which is suitable for carrying out the method and has a device for holding and for rotating the workpiece about the longitudinal axis.

Method and device for simultaneously cutting off a multiplicity of wafers from a workpiece

Material removing machining is for wafer shaped workpieces, in particular semiconductor wafers. There is a method for achieving a wear performance which is as linear as possible for a tool which has an essentially planar working surface for the material removing machining of wafer shaped workpieces. The tool has a wear performance which is as linear as possible. There are also a method and a device for measuring a wear profile on an essentially planar working surface for the material removing machining of wafer shaped workpieces. There is also a carrier which is used for the two-sided material removing machining of wafer shaped workpieces.

Method for achieving a wear performance which is as linear as possible

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Postbauer-Heng, Germany

Bert Ripper