Asml Netherlands B.v.

Vito Nv

Vlaamse Instelling Voor Technologisch Onderzoek (vito)

Katholieke Universiteit Leuven

Vlaamse Instelling Voor Technologisch Onderzoek

Bert Claessens

Herman Philip Godfried

Paul Van Der Veen

Reinhilde D'Hulst

Maarten Hommelberg

Marcel Mathijs Theodore Marie Dierichs

Heine Melle Mulder

Wilfred Edward Endendijk

Johan Van Bael

Johan Driesen

Willem Jan Bouman

Bert Pieter Van Drieënhuizen

Sven De Breucker

Koen Vanthournout

Fedor De Ridder

Jozef Ferdinand Dymphna Verbeeck

Peter Vrancx

Thijs Johan Henry Hollink

Marc Hendricus Margaretha Dassen

Stijn Vandael

Sam Weckx

A deep approximation neural network architecture which extrapolates data over unseen states for demand response applications in order to control distribution systems like product distribution systems of which energy distribution systems, e.g. heat or electrical power distribution, are one example. The method is a model-free control technique mainly in the form of Reinforcement Learning (RL) where a controller learns from interaction with the system to be controlled to control product distributions of which energy distribution systems, e.g. heat or electrical power distribution, are one example.

Methods, controllers and systems for the control of distribution systems using a neural network architecture

A method or system for controlling an energy or power supply network having a coordination centre, a plurality of local end-user units and a communications network linking the local units and the coordination centre and a supply network connecting the local units and the coordination centre for energy or power supply. The supply network has constraints that limits power or energy consumption at at least one of the local end-user units. The method or system is adapted so that the coordination centre transmits a control signal indicating a degree of imbalance of the system to the at least one of the local end-user units, and the at least one local end-user unit is adapted to transmit a reaction signal to the coordination centre indicative of a power schedule for the local unit.

Power supply network control system and method

Method and system for distributing and/or controlling an energy flow to a cluster of a plurality of nodes in an electricity network, wherein each node has an associated status, taking into account constraints relating to the energy delivered to the nodes and constraints relating to the electricity network, comprised of:

Method and system for distributing and/or controlling an energy flow taking into account constraints relating to the electricity network

The system comprises a controller comprising software components for determining the difference between the amount of energy determined by the smart grid agent to be delivered to and from the cluster over a predetermined period of time and the amount of energy measured by the meter actually delivered to the cluster over the predetermined period of time, the controller comprising software components for simulating a virtual smart grid participating device based on the determined difference and for providing the smart grid agent with information based on the determined difference such that the smart grid agent is configured to determine the amount of electrical energy in function of time to be delivered to and from the electrical grid for both the smart grid participating and non-participating devices of the cluster based on information of both the devices of the cluster and the smart grid and such that the difference is reduced.

System for distributing electrical energy over a cluster of electrical devices, method for distributing electrical energy over a cluster of electrical devices of such a system and controller for use in such a system

Method for distributing an energy flow to a cluster of a plurality of devices taking into account constraints relating to the energy to be delivered to the devices, comprising the steps of: A. gathering flexibility information of the respective devices in the cluster, combining the flexibility information of the devices of the cluster into flexibility information for the cluster, B. determining accumulated energy to be delivered in function of time over the predetermined period of time, C. supplying the determined accumulated energy to the cluster by obtaining, from the flow of energy, power in function of time based on the determined accumulated energy to be delivered in function of time, determining priority for power for all devices in the cluster and distributing the obtained power among the devices of the cluster.

Method for distributing an energy flow over a predetermined period of time to a cluster of a plurality of devices taking into account constraints relating to the energy to be delivered to the devices, a computer program for performing such a method and a system therefor

A method for buffering thermal energy comprises a thermal buffering medium contained by a thermal energy buffer. The volume of the thermal buffering medium is subdivided in one or more parts such that the different parts of the volume of the thermal buffering medium together form the total thermal buffering medium. The thermal energy buffer comprises a temperature sensor for each part. A controller has at least one signal representing at least one thermal energy value related to the thermal energy buffer. The thermal energy values comprise a predetermined minimum amount of thermal energy present in the thermal energy buffer. The controller controls a heater such that the amount of thermal energy present in the thermal energy buffer is higher than or equals the predetermined minimum amount of energy present in the thermal energy buffer.

Method and system for buffering thermal energy and thermal energy buffer system

An illumination system having an array of individually controllable optical elements is disclosed, wherein each element is moveable between a plurality of orientations which may be selected in order to form desired illumination modes. The illumination system includes a controller to control orientation of one or more of the elements, the controller configured to apply force to the one or more elements which at least partially compensates for force applied to the one or more elements by a burst of radiation incident upon the one or more elements.

Illumination system and lithographic apparatus

A two-stage homogenizer comprising a first homogenizer stage and a second homogenizer stage. The first homogenizer stage includes a pair of microlens arrays and associated focusing optics. The second homogenizer stage includes a second pair of microlens arrays and associated focusing optics. The second homogenizer stage is positioned to receive radiation which is output from the first homogenizer stage.

Homogenizer

A lithographic apparatus including a radiation beam monitoring apparatus, the radiation beam monitoring apparatus including an optical element configured to generate a diffraction pattern, and an imaging detector located after the optical element and not in a focal plane of the optical element such that the imaging detector is capable of detecting a mixture of spatial coherence and divergence of the radiation beam.

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Spalbeek, Belgium

Bert Claessens