Leybold Aktiengesellschaft

Bernhard Schoenherr

Karl-Heinrich Wenk

In a row evaporator for vacuum vapor depositing apparatus, having a plurality of conductively heated evaporator cells (5, 5', . . . ) disposed in the process chamber (11) and individually controllable in output, and connected to jaw-like electrical contacts (3, 3', . . . ; 4, 4', . . . ), the jaw-like contacts are held by an electrically conductive supporting body (6) extending over the entire length of the row evaporator, while the contacts (3, 3', . . . ) of the one polarity are electrically connected to the supporting body (6), and the contacts (4, 4', . . . ) of the other polarity are subject to the action of a plunger (9, 9', . . . ) which is configured as a cylindrical bolt and is brought outwardly through the wall (10) of the process chamber so as to be vacuum-tight yet longitudinally displaceable, so that the cross-sectional area of this plunger (9, 9', . . . ) remains exposed to atmospheric pressure during the operation of the apparatus, and then presses the contacts or jaws (4, 4', . . . ) against their individual evaporator cells (5, 5', . . . ) with sufficiently measured force.

Serial evaporator for vacuum vapor depositing apparatus

A high-vacuum coating apparatus for coating films has beneath its coating cylinder (7) a pivoting unit (8) which can turn on a pivot shaft (25). It has an adjustable mask (29) and thereunder a shutter (28) which can run from a position covering an evaporator to a position releasing it. Due to its ability to turn, the pivoting unit (8) together with its parts can easily be cleaned.

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Offenbach, Germany

Bernhard Schoenherr