Hughes Danbury Optical Systems, Inc.

Bernhard P Piwczyk

William G McKinley

John R Burgess

A deformable substrate chuck includes a deformable mounting plate supported by a plurality of individually controllable variable-length actuators. Each actuator is controllable to vary the height of the portion of the deformable mounting plate which it supports. A chamber within the mounting plate accessible through a vacuum port can be evacuated to hold a substrate such as a semiconductor wafer or a flat panel display to a porous top surface of the mounting plate. An optical sensing system senses the shape of the substrate and generates control signals used to control the lengths of the variable-length actuators to control the shape of the substrate.

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Carlisle, MA, United States of America

Bernhard P Piwczyk