Pfeiffer Vacuum Gmbh

Pfeiffer Vacuum Technology Ag

Bernhard Koch

Jan Hofmann

Joerg Stanzel

Mirko Mekota

Michael Schill

Uwe Leib

Bernhard Tatzber

Torsten Gogol

Nikolai Wolff

A vacuum pump includes a pump inlet, a pump outlet, a rotor rotatable about an axis of rotation, at least one process gas pump stage for conveying a process gas present at the pump inlet from the pump inlet to the pump outlet, a motor space, and a drive motor which is arranged in the motor space, is configured for rotationally driving the rotor and which has a motor stator, wherein at least one gas path is provided for the process gas from the pump inlet to the pump outlet which leads through the motor space and which leads at least sectionally along the motor stator or through the motor stator.

Vacuum pump

A bearing module for supporting a rapidly rotatable shaft of a vacuum pump includes a rolling bearing for supporting rotatably the shaft, a reservoir for a lubricant having an element forming a sliding contact with a delivery structure supported on the shaft for delivery of the lubricant in the rolling bearing under action of centrifugal forces generated during rotation of the shaft, and a radial delivery element provided on a side of the rolling bearing opposite a side of the bearing at which the delivery structure is located, for returning the lubricant to the reservoir.

Bearing module for a vacuum pump

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Munich, Georgia

Bernhard Koch