Endress + Hauser Gmbh + Co. Kg

Endress+hauserse+co. Kg

Bernhard Jochem

Anh Tuan Tham

Benjamin Lemke

Rafael Teipen

Timo Kober

Roland Werthschützky

Darina Riemer Woyczehowski

Darina Woyczehowski

A differential pressure sensor comprises a measuring diaphragm made of an electrically conductive material, two electrically insulating mating bodies, and at least one capacitive transducer. The measuring diaphragm is connected to the mating bodies in a pressure-tight manner with the formation of a measuring chamber in each case along a circumferential edge. The mating bodies each have a diaphragm bed which is concave in the center, wherein the mating bodies each have a pressure channel which extends through the mating body into the measuring chamber. The capacitive transducer has at least one mating body electrode which is formed by a metallic coating of the surface of the mating body in the region of the diaphragm bed and with which contact can be made by a metallic coating of the wall of the pressure channel. The mating body electrode is formed by an inner region of the metallic coating, which inner region is annularly enclosed by an outer region of the coating and is separated from the latter by an annular insulation region.

Differential pressure sensor

Growing community of inventors

Darmstadt, Germany

Bernhard Jochem