Vat Holding Ag

Bernhard Duelli

Friedrich Geiser

Anton Neumeir

Christoph Angst

Thomas Blecha

Thomas Mayer

Martin Kienreich

Leo Marugg

Karlheinz Summer

Robert Gsteu

A closure device including a closure element for closing an opening surrounded by a valve seat of the closure device. The closure device has an open state, in which the closure element exposes the opening at least partly, for an object to be led through the opening, an intermediate state, in which the closure element is brought into alignment with the opening without contact with the valve seat, and a closed state, in which the closure element at least rests on the valve seat via a seal of the closure device. The seal has a hollow space, to which a pressure medium from a pressure source of the closure device can be applied, and the closure device has a suction apparatus for sucking the pressure medium out of the hollow space of the seal.

Closure device

A vacuum valve with a housing having a valve seat, a closure member which, in a closed position, is pressed against the valve seat, and a manual actuator, by which the closure member is displaceable in a linear manner and which includes a screw transmission, which is actuatable by a rotational element and has a first driving part connected to the rotational element and a second driving part connected to the closure member. The driving parts have mating external and internal threads. A closing spring acts between the valve housing and the closure member. The first driving part is displaceable relative to the valve housing parallel to the closing direction, and with the closure member in the open position, the closure member is held against displacement in the closing direction by a supporting stop against which a stop face of the rotational element or of the first driving part abuts.

Vacuum valve

A vacuum valve including a closure element () and a valve housing () with a valve opening () and an interior () in which the closure element () is arranged, the closure element resting against a valve seat () surrounding the valve opening () in the closed state of the vacuum valve. The valve housing () has a housing wall () made of sheet metal, the housing wall delimiting the interior () and being provided with a window opening () in order to form the valve opening (). The valve opening () is surrounded by a flange ring () that can be connected to a connection flange () of a vacuum unit () via screw connections, the vacuum unit having an interior and being attachable to the vacuum valve. The flange ring () has the valve seat () on which the closure element () is placed in the closed state of the vacuum valve.

Device for closing an opening in a chamber wall of a low-pressure or vacuum chamber, having at least one movably mounted closure element, a main body with a through-opening and a seat, which surrounds the through-opening, the through-opening is congruent with the opening in the chamber wall, and the device has at least one open position of the closure element, in which the through-opening is exposed by the closure element, and at least one closed position, in which the through-opening is completely closed using the closure element. At least one elastic seal with an inflatable chamber is sealingly arranged in the closed position between the closure element and the seat and the elastic seal has in addition to the inflatable chamber a safety chamber for receiving fluid from the inflatable chamber in the event of a leak in the inflatable chamber.

Device for closing an opening in a chamber wall

A vacuum valve including a valve opening, a valve seat surrounding the valve opening, and a valve plate. During closing starting from the open position, the valve plate is moved over a main section of the closing path in a main closing direction parallel to the valve plate and the plane of the sealing surface, and then over a final section running at an angle to the sealing surface plane for guiding the valve plate onto the valve seat. A guide element on the wall that guides the valve plate over the end section of the closing path interacts with a guide element on the valve plate. The valve plate is guided over the final section of the closing path by guide surfaces that are angled relative to the sealing surface, and at least one guide surface is arranged on a guide element of the valve plate or the wall.

A method for controlling or regulating a vacuum valve that includes: a valve body () with a valve opening (); a closing member () that can be moved between an open position and a closed position over a closing path (s) for closing the vacuum valve and that closes the valve opening () in the closed position, in which at least one elastic seal () is pressed onto a seal face (); an actuator () for moving the closing member (); and a control device () by which the actuator () can be triggered; the point (p) of the closing path (s) at which the elastic seal () contacts the seal face () and/or a velocity (v) of the closing member () at that point is used as a controlling parameter for the control device ().

Method for controlling or regulating a vacuum valve

The invention relates to a vacuum valve for gas-tight sealing of a flow path, comprising at least one thrust rod, which has a cylindrical connecting section, and a closure plate which is removably mounted on the thrust rod and has at least one concave, semicircular first rod recess corresponding to the connecting section. A clamping piece, which has a concave, semicircular second rod recess corresponding to the connecting section, is adjustably mounted by means of a mechanical fixing element on the closure plate in such a way that the semicircular first rod recess and the opposite semicircular second rod recess define a cylindrical holding region which is adjustable in width and in which the cylindrical connecting section is detachably held.

Vacuum valve and closure plate for a vacuum valve

A vacuum valve including a valve housing two valve openings, a closure member having two closure plates, a transverse drive unit for adjusting the closure member between an open position and an intermediate position where the closure plates cover the valve openings, a first longitudinal drive unit for adjusting the closure member between the intermediate position and a first closed position, and a second longitudinal drive unit for adjusting the closure member between the intermediate position and a second closed. Each longitudinal drive unit includes a plurality of actuating elements which are guided into the vacuum area of the valve housing. These actuating elements are adjustable by driving elements between a retracted, passive position where their actuating ends are raised from the closure member and an advanced, active position where their actuating ends are pressed against the closure member and press the respective closure plate against the respective valve seat.

A vacuum valve comprises a conical sealing surface arranged at a valve body, a valve disk at which a conical sealing surface is arranged, and a sealing ring having a first sealing surface and a second sealing surface. The valve disk, the valve body and the sealing ring are made of metal at least in the areas of the sealing surfaces. The valve disk is constructed so as to be curved or angled considered in axial section through the center and encloses an angle of less than 90&#xb0; with the closing direction in the unloaded state at least in a radial outer portion adjoining the sealing surface. The valve disk has an elasticity such that a displacement of the radial outer edge of the valve disk relative to a point in the center of the valve disk of at least 0.1% of the diameter of the valve disk in direction of the center axis of the valve disk is bought about in the closed position of the valve disk relative to the open position of the valve disk by an elastic deformation of the valve disk.

A method for controlling a vacuum valve arranged between two vacuum chambers comprises a valve body with a valve opening, a closure member which closes the valve opening in a closed state of the vacuum valve and which releases the valve opening in an open state of the vacuum valve, wherein, for closing the valve opening by the closure member in the closed state of the vacuum valve, at least one flexible seal contacts a sealing surface of the vacuum valve, which sealing surface is acted upon by a pressing force in the closed state of the vacuum valve, an actuating device for opening and closing the vacuum valve with at least one actuator by which the seal is placed against the sealing surface for closing the vacuum valve, and with a control unit which controls this at least one actuator, pressure measurement values being supplied to this control unit as input signals from pressure sensors which detect the respective pressure in the two vacuum chambers, wherein a differential pressure between the two vacuum chambers is determined by the control unit and the magnitude of the pressing force acting on the seal in the closed state of the vacuum valve is controlled by the control unit depending on the determined differential pressure by controlling the at least one actuator.

Method for control of a vacuum valve arranged between two vacuum chambers

A regulating vacuum valve comprises a valve body with a through-channel a closure member which is adjustable over a control path between a closed position of the regulating vacuum valve in which it contacts a valve seat and closes the through-channel and an open position of the regulating vacuum valve in which it is raised from the valve seat, an adjusting device which has a drive unit for adjusting the closure member over the control path, a carrying unit which carries the closure member and is supported so as to be displaceable relative to the closure member. The carrying unit is arranged in the through-channel and is secured to the valve body, and the carrying unit has a chamber which is sealed relative to the through-channel and in which the adjusting device or at least a portion thereof is arranged.

Regulating vacuum valve

A closure device for a vacuum closure of at least one opening in a wall having a valve place, at least one piston-cylinder unit, at least one carrier unit, at least one cylinder bore hole, at least two sealing rings, and a line. The valve plate is associated with an opening and is displaceable between an open position in which it releases the opening, a position in which it covers the opening but is raised from the wall and a closed position in which it covers the opening and contacts the wall. The at least one piston-cylinder unit serves to displace the valve to the different positions and includes a pneumatically actuated piston. At least one carrier unit is connected to a piston rod which serves to displace the valve to the different positions.

Closure device for vacuum closure of at least one opening in a wall

A vacuum valve comprises a wall with a valve opening and a valve seat, a valve plate which is pressed against the valve seat in the closed state, an elastic sealing ring which is arranged at the valve plate or at the valve seat and, in the closed state of the valve, is pressed by a pressing force against a sealing surface arranged at the valve seat or at the valve plate and seals the valve opening, and a supporting ring which is made of plastic and which is arranged at the valve plate or at the valve seat and, at least in the closed state of the vacuum valve, lies closer to the valve opening than the sealing ring, viewed from the sealing ring, and limits the pressing force acting on the sealing ring in the closed state of the vacuum valve.

A linear motion leadthrough for a rod which has a first end, a second end and an outer surface and whose first end projects into a vacuum area of a vacuum installation while its second end is located outside of the vacuum area, comprises: a bushing which has an inner wall and through which the rod extends and which is displaceable linearly relative to the rod, at least one elastomer sealing ring for sealing the rod relative to the bushing which is secured to the inner wall of the bushing or to the outer surface of the rod, wherein the sealing ring is lubricated by a lubricant, and a bellows which is arranged inside the vacuum area, has a first end and a second end, encloses a portion of the rod located inside the vacuum area and delimits a space located between the rod and the bellows from a space lying outside the bellows, and whose first end is fastened to the rod and whose second end is fastened to the bushing or to a part enclosing the bushing, wherein at least one opening is provided which connects the space between the rod and the bellows with the space outside the bellows.

Linear motion leadthrough

A diaphragm bellows device comprises a diaphragm bellows with a plurality of successive diaphragms which are welded together alternately at the outer and inner edges, wherein the length of the diaphragm bellows can be adjusted between an expanded state and a contracted state, and a plurality of sleeve parts which surround the successive diaphragms and which, together, enclose the successive diaphragms also in the expanded state of the diaphragm bellows over its entire longitudinal extension and overlap to a greater or lesser extent in axial direction of the diaphragm bellows depending on the adjusted length of the diaphragm bellows, wherein at least one of the sleeve parts is held on the welded outer edges of two adjoining diaphragms by a snap connection.

Growing community of inventors

Uebersaxen, Austria

Bernhard Duelli