Inficon Ag

Inficon Gmbh

Inficon Holding Ag

Bernhard Andreaus

Stefan Kaiser

Martin Wüest

Urs Wälchli

Astrid Waldner

Rolf Enderes

Carsten Strietzel

Oskar Untermarzoner

Claudio Christoffel

Rudolf Stocker

Philip Spring

Christian Berg

Christian Riesch

Mario Weder

Michael Trefzer

Method for operating a groupof pressure sensors which are arranged in such a manner that they can measure the pressure in a common measurement volume, wherein the group of pressure sensors comprises at least a first pressure sensor' with a first pressure measurement range and a second pressure sensor″ with a second pressure measurement range, wherein the first and second pressure measurement ranges overlap in an overlap pressure measurement range, wherein the first and second pressure sensors are each based on an indirect pressure measurement principle and are configured to output a measurement signal calibrated to a reference gas, and wherein the method comprises the steps of: a) providing calibration data specific to the type of gas for the first measurement signal and for the second measurement signal, which calibration data describe a dependence of the first and second measurement signals on the effective pressure and on a list of types of gas, respectively; b) recording a first and a second measured value of the first and second measurement signals, respectively; c) determining a resultant type of gas which best matches the combination of the recorded first measured value and the recorded second measured value, taking into account the first and second calibration data. In one variant, a resultant pressure which is independent of the type of gas is additionally determined. The invention is also directed to an apparatus for earring out the method and to a computer program product.

Method for operating a group of pressure sensors

The present invention relates to a device for plasma generation in a wide pressure range. The device comprises a first plasma source () in a first discharge chamber () in order to generate a first plasma in a low-pressure range, a second plasma source () in a second discharge chamber () in order to generate a second plasma in a high-pressure range, a first coupling element () for coupling the device to a system, in order to guide gas out of the system, and a second coupling element () for coupling the device to an optical sensor (). The first discharge chamber () has a first optical connection with at least one optical lens () to the second coupling element () and the second discharge chamber () has a second optical connection with at least one optical lens () to the second coupling element (). This invention further relates to a system for optical gas analysis or gas detection and corresponding methods for plasma generation and for operating the system.

Device and method for plasma generation in a wide pressure range and system and method for optical gas analysis/detection by means of such a device

Chamber () for bounding a plasma generation area () in a vacuum pressure sensor (), wherein the chamber comprises an electrically conductive casing element (″) located radially on the outside relative to a central axis, wherein the chamber comprises electrically conductive wall elements (″) arranged substantially perpendicular to the central axis and connected to the casing element, wherein at least one of the wall elements has a first opening (), through which the central axis extends, wherein the casing element comprises at least a first (B) and a second region (B), wherein the first region is located closer to the central axis than the second region. The invention further relates to a vacuum pressure sensor comprising the chamber.

Chamber for an ionization vacuum gauge

A vacuum feedthrough () which is constructed in radial layers comprises the following elements (from inwards to outwards): —a lens element (), —a first ring () made of glass, —a first hollow cylinder () made of a first dielectric material, —a first electrically conductive layer (), —a second hollow cylinder () made of glass, —a third hollow cylinder () made of ceramic, —a second ring made of glass (), and—a frame () made of metal. On the basis of the vacuum feedthrough, the invention additionally relates to an electrode assembly, to a device for generating a DBD plasma discharge, to a measuring device for characterizing a pressure and/or a gas composition, and to a method for operating the measuring device.

Vacuum feedthrough, electrode assembly, and device for generating a silent plasma discharge

The invention relates to a methodfor determining a pressure in a vacuum system, wherein the method comprises the steps of:

Method for detecting pressure, and pressure sensor

A vacuum pressure sensor includes a vacuum-tight electrical feedthrough. The feedthrough has an electrically insulating insulator element with a through-opening, having a first boundary surface adjacent to the through-opening and a second boundary surface also adjacent to the through-opening and opposite to the first boundary surface, and an electrically conductive conductor element which extends through the through-opening and which is connected to the insulator element in a vacuum-tight manner along a circumferential line of the conductor element. The insulator element is transmissive to electromagnetic radiation in an optical wavelength range and the first boundary surface and/or the second boundary surface is formed as a curved surface.

Vacuum-tight electrical feedthrough

A methodfor the controlled removal of a protective layerfrom a surface of a component, wherein the component comprises:

Method for the controlled removal of a protective layer from a surface of a component

An ionization vacuum measuring cell comprises an anode () and a cathode () in a measuring chamber (). The measuring chamber () is arranged in a housing () which has a vacuum-tight feedthrough () for a connection rod () of the cathode () towards the outside. The measuring chamber () holds the rod () in a feedthrough () which is electrically insulating only. The measuring chamber () in the housing () can be exchanged by a releasable plug connection ().

Ionization vacuum measuring cell

An ionization vacuum measuring cell has: a) an evacuatable housing () with a measuring connection () for the vacuum to be measured, b) a first outer and a second inner electrode () which are coaxially arranged in an interspaced manner with a common axis (), whereby a measuring chamber () is formed between the two electrodes, the measuring chamber communicating with the measuring connection (), c) a voltage source () which is connected to the electrodes (), d) a current measuring mechanism () for analyzing a discharge current generated between the electrodes (), and e) at least one permanent magnet ring () which surrounds the coaxial electrode () arrangement, has a magnetizing direction () directed radially to the axis, and has a soft-magnetic yoke () that surrounds the permanent magnet ring ().

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Rapperswil, Switzerland

Bernhard Andreaus