Ict Integrated Circuit Testing Gesellschaft Fur Halbleiterpruftechnik Mbh

Bernd Woellert

Dieter Winkler

Benjamin John Cook

A method of influencing a charged particle beam () propagating along an optical axis (A) is described. The method includes: guiding the charged particle beam () through at least one opening () of a multipole device () that comprises a first multipole () with four or more first electrodes () and a second multipole () with four or more second electrodes () arranged in the same sectional plane, the first electrodes and the second electrodes being arranged alternately around the at least one opening (); and at least one of exciting the first multipole to provide a first field distribution for influencing the charged particle beam in a first manner, and exciting the second multipole to provide a second field distribution for influencing the charged particle beam in a second manner. Further, a multipole device () with a first multipole () and a second multipole () provided on the same substrate as well as a charged particle beam apparatus () with a multipole device () are provided.

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Markt Schwaben, Germany

Bernd Woellert