First Solar, Inc.

Von Ardenne Asset Gmbh &co. Kg

Von Ardenne Gmbh

Von Ardenne Anlagentechnik Gmbh

Bernd Teichert

Thomas Meyer

Carsten Deus

Torsten Dsaak

Ralf Biedermann

Michael Rivkin

Klaus Schneider

George Arthur Proulx

Christoph Kaiser

Henrik Obst

Peter Lenk

In various aspects of the disclosure, a method of operating a process group that performs at least a first reactive coating process and a second reactive coating process may comprise: coating of a substrate by means of the first reactive coating process and by means of the second reactive coating process; closed-loop control of the process group by means of a first manipulated variable of the first coating process and a second manipulated variable of the second coating process and using a correction element; wherein the correction element relates the first manipulated variable and the second manipulated variable to one another in such a way that their control values are different from one another.

Method and control device

According to various embodiments, a vacuum arrangement may comprise the following: a first dehydration chamber and a second dehydration chamber, which are gas-separated from one another; a substrate transfer chamber for changing clocked substrate transport into continuous substrate transport towards the second dehydration chamber; a first high-vacuum pump of gas-transfer type for evacuating the first dehydration chamber; and a second high-vacuum pump of gas-binding type for evacuating the second dehydration chamber; wherein the first dehydration chamber is, with respect to the substrate transport, arranged between the second dehydration chamber and the substrate transfer chamber.

Vacuum arrangement and method

In various embodiments, a physical vapor deposition tile arrangement is provided. The physical vapor deposition tile arrangement may include a plurality of physical vapor deposition tiles arranged next to each other; and a resilient structure configured to press the plurality of physical vapor deposition tiles together.

Physical vapor deposition tile arrangement and physical vapor deposition arrangement

Growing community of inventors

Dresden, Germany

Bernd Teichert