Kernforschungszentrum Karlsruhe Gmbh

Burkert Gmbh Werk Ingelfingen

Burkert Werke Gmbh & Co.

Burkert Gmbh & Co.

Bernd Kowanz

Wolfgang Ehrfeld

Dirk Schmidt

Walter Bacher

Peter Bley

Michael Harmening

Jurgen Mohr

Valve with piezoelectric lamina and a method of producing a valve

Method of producing microstructures having regions of different

The plate-like valve elements (10 and 20) of the microvalve are provided with a plurality of valve seats and, respectively, corresponding valve members. The sealing surfaces of a secondary valve element (10) are respectively formed by molding to copy the sealing faces of a primary valve element (20) so that the sealing surfaces of both valve elements are completely complementary to each other. The sealing surfaces need no further processing such as machining. Despite liberal tolerances of manufacture a high precision register of the valve elements in relation to each other is ensured.

Method of manufacturing microvalves

A valve plate (14) provided with slot-like valve ports (16) is able to slide between two stationary valve plates (10 and 12) which are joined with each other and are provided with corresponding slot-like valve ports (16). A electrostatic drive is integrated in the valve plates (10, 12 and 14). It consists of strip-like electrodes (20 and 22) which are arranged opposite to corresponding electrodes of another valve plate. By the application of suitable actuating potentials with the same or opposite polarity to the electrodes of different valve plates the actuating forces may be produced, which are needed for moving the movable valve plate (14).

Microvalve

Growing community of inventors

Ohringen, Germany

Bernd Kowanz