Carl Zeiss Ag

Carl Zeiss Laser Optics Gmbh

Carl-zeiss-smt Ag

Carl-zeiss-stiftung

Other

Carl Zeiss Semiconductor Manufacturing Technologies Ag

Carl Zeiss Smt Gmbh

Carl Zeiss Jena Gmbh

Bernd Kleemann

Wolfgang Singer

Markus Weiss

Jeffrey Erxmeyer

Artur Degen

Ralf Kuschnereit

Willi Ulrich

Klaus Heidemann

Stefan Weissenrieder

Vadim Yevgenyevich Banine

Johannes Wangler

Martin Endres

Johannes Ruoff

Frank Melzer

Joachim Hainz

Ralf Arnold

Dieter Bader

Andreas Heisler

Karlfried Osterried

Hans-Jurgen Rostalski

Michel LeMaire

Hans-J&uuml;rgen Rostalski

An optical system for transmitting a source image is provided. Light having a field angle spectrum emanates from the source image. The optical system includes an optical waveguide arrangement, in which light can propagate by total internal reflection. The optical system also includes a diffractive optical input coupling arrangement for coupling the light emanating from the source image into the optical waveguide arrangement. The optical system further includes a diffractive optical output coupling arrangement for coupling the light that has propagated in the optical waveguide arrangement out from the optical waveguide arrangement. The disclosure also provides related methods.

Optical system and method for transmitting a source image

An optical arrangement includes a light source which emits coherent light of a wavelength &#x3bb;, and a diffraction grating which has a multiplicity of diffraction structures which follow one another periodically at the spacing of a grating period d and are arranged along a base surface, the individual diffraction structures respectively having a blaze flank and an antiblaze flank, the blaze flanks being arranged at an angle &#x3b2; and the antiblaze flanks being arranged at an angle &#x3b1; to the base surface, and respectively neighbouring blaze and antiblaze flanks enclosing an apex angle &#x3b3;, and an incident light beam being arranged at a Littrow angle &#x3b8;relative to a grating normal of the diffraction grating. The angle &#x3b2; of the blaze flanks to the base surface is selected as a function of the Littrow angle &#x3b8;such that the diffraction efficiency is at least approximately maximal in one of the largest diffraction orders m, which still fulfils the condition (2((m+1)/m)&#x2212;1)sin &#x3b8;&#x2267;1, and for at least one polarization direction.

Optical arrangement, method of use, and method for determining a diffraction grating

An optical display device, in particular for use in a head-up display or a head-mounted display, comprises an essentially planar light guide, an image-generating system, a first diffraction grating by which light that comes from the image-generating system can be coupled into the light guide, and a second diffraction grating, by which the light can be coupled out again from the light guide. At least one of the two diffraction gratings is a binary-blazed grating having a multiplicity of diffraction structures, which are composed of a multiplicity of individual substructures that ensure a blaze effect and in plan view have the shape of a closed geometrical surface.

Optical display device

A diffractive optical element has a support and a plurality of diffraction structures. The latter are applied on the support and are binary blazed by being split into substructures so that the aspect ratio of the substructures varies locally within an individual diffraction structure. One or more substructures with a large aspect ratio inside an individual diffraction structure are replaced by at least one substitute structure whose aspect ratio is less than that of the replaced substructures.

Blazed diffractive optical element and projection objective for a microlithographic projection exposure apparatus

A polarization-selectively blazed, diffractive optical element including multiple contiguous blaze structures extending along a given geometrical path. Each structure has a width perpendicular to direction of extension greater than the Wavelength of the electromagnetic radiation for which the element is designed. Each blaze structure multiple individual substructures arranged next to each other in the direction of extension according to a predetermined period. The substructures providing the blaze effect have the shape, when viewed from above, of a closed geometrical surface whose dimension parallel to the direction of extension varies perpendicular to the direction of extension, but is always smaller than the wavelength of the electromagnetic radiation, and whose maximum dimension perpendicular to the direction of extension is greater than the wavelength of the electromagnetic radiation. The filling ratio of the individual substructures in the direction of extension relative to the period is selected such that, as a function of the position perpendicular to the direction of extension, the blaze effect is optimized for one polarization condition.

Polarization-selectively blazed, diffractive optical element

A blazed diffractive optical element has a support and a plurality of blazed diffraction structures. The diffraction structures are applied on the support and are spaced apart by a locally varying grating constant. In a first region, the diffraction structures have an at least approximately ramp-shaped profile. In a second region, the diffraction structures are binary blazed by splitting them into substructures that may have the shape of pillars or bars.

An illumination system, particularly for wavelengths &#x2266;100 nm, with an object plane and a field plane, comprises a grating element and a physical diaphragm in a diaphragm plane, which is arranged downstream to the grating element in the beam path from the object plane to the field plane.

Illumination system with a grating element

An optical grating has a multiplicity of parallel diffraction structures, which are arranged on a support defining a base face. Each structure has a blaze flank that is inclined substantially at the Littrow angle with respect to the base face, and a back flank. Both flanks together form a reflection layer which comprises a reflective base layer and a transparent protective layer that is connected to the base layer and covers it. The protective layer on the blaze flank and the protective layer on the back flank are made of the same material. The thicknesses of the protective layers on the blaze flank and on the back flank, however, are different.

Optical grating and method for the manufacture of such an optical grating

A diffractive optical element has a plurality of diffraction structures for a certain wavelength. These each have a width measured in the plane of the diffractive optical element and a height measured perpendicularly thereto. The widths and the heights of the diffraction structures vary over the area of the diffractive optical element. An optical arrangement comprising such a diffractive optical element has, in addition, a neutral filter. The efficiency of such a diffractive optical element and of such an arrangement can be optimized locally for usable light.

Diffractive optical element and also optical arrangement comprising a diffractive optical element

A diffractive optical element contains a multiplicity of binary blazed diffraction structures, which substantially extend mutually parallel in a longitudinal direction. Perpendicularly to the longitudinal direction, the diffraction structures have a width g which is greater than the effective wavelength of electromagnetic radiation for which the diffractive optical element is designed. The diffraction structures respectively comprise a series of individual substructures, which produce a blaze effect and have a maximum extent p in the longitudinal direction which is less than the effective wavelength of the electromagnetic radiation, at least on average over a diffraction structure. In a plan view, the individual substructures respectively have the shape of a closed geometrical surface, which has an extent parallel to the longitudinal direction that varies perpendicularly to the longitudinal direction. Perpendicularly to the longitudinal direction, the surface has a maximum extent which is greater than the effective wavelength.

Diffractive optical element

Optical arrangement, optical grating and method for the manufacture of such an optical grating

There is provided an illumination system for wavelengths of &lE;100 nm, having an object plane and a field plane. The illumination system includes a grating element having a plurality of gratings, and a diaphragm. The diaphragm is arranged after the grating element in a beam path from the object plane to the field plane.

Illumination system with a plurality of individual gratings

A Littrow grating ( ) comprises a multiplicity of parallel diffraction structures ( ) succeeding one another periodically. The latter are arranged on a support ( ) defining a base area ( ). A diffraction structure ( ) comprises a blaze flank ( ) inclined towards the base area ( ) substantially at the Littrow angle (&dgr;). In addition the diffraction structure ( ) comprises a counter-flank ( ) which forms with the blaze flank ( ) at the apex of a diffraction structure ( ) an apex angle (&agr;) which is less than 90&deg;. The counter-flank ( ) comprises at least two substantially plane area sections ( ). The latter extend, bordering one another and inclined relative to one another through an angle of inclination (&bgr;), parallel with the extension direction of the diffraction structure ( ). Due to the inclination of the at least two area sections ( ) relative to one another, the counter-flank ( ) exhibits all in all a concave surface viewed from the light incidence side. A Littrow grating ( ) of high reflectivity is obtained, which may be achieved with the removal of only a small amount of material at the manufacturing stage.

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Aalen, Germany

Bernd Kleemann