Polytec Gmbh

Bernd Armbruster

Matthias Schussler

Bernd Heinen

Christian Rembe

Helmut Selbach

A method for determining the path of a measurement beam of an interferometric measuring device, includes A. recording a plurality of spatially resolved images of the object under measurement; B. creating a three-dimensional model of the object under measurement; C. providing a beam-position image-recording unit and recording at least one spatially resolved beam-position-determining image; D. determining the spatial position and orientation of the beam-position image-recording unit relative to the object under measurement; E. providing a spatial relation between the spatial path of the measurement beam of the interferometric measuring device and the position and orientation of the beam-position image-recording unit; F. determining the spatial path of the measurement beam of the interferometric measuring device relative to the object under measurement. A measuring device for interferometric measurement of an object under measurement is also provided.

Method for determining the path of a measurement beam of an interferometric measuring device, and measuring device for interferometric measurement of an object under measurement

An alignment method for a beam-directing unit of an interferometric measuring device for directing a laser beam of a laser beam source towards a plurality of measurement points of an object under measurement, wherein a three-dimensional model of a measurement surface of an object under measurement is created by a plurality of spatially resolved images. A measuring device for carrying out an interferometric measurement by laser radiation is also provided, having a controller which is designed to align a beam-directing unit of the measurement device.

Alignment method for a beam-directing unit of an interferometric measuring device, and measuring device for carrying out an interferometric measurement by means of laser radiation

A scanning microscope for the optical measuring of an object in which a measurement beam emitted by the light source impinges the object and is reflected by the object as a reflection beam that reenters through the lens into the radiation path of the microscope. A scanner control unit controls a displacement to change the relative position of the object and the measuring beam so that the beam is directed to at least two different measuring points on the object. An excitation unit periodically excites the object. The reflection beam is visualized on a signal detector, and a signal storage unit saves a measuring sequence of signals of the signal detector. The scanner control unit cooperates with the excitation and signal storage units to control them such that for each measuring point on the object at least one measuring sequence of measuring signals of the signal detector is saved.

Scanning microscope for optically measuring an object

A measurement device for oscillation measurement, as well as a corresponding method, is proposed, wherein the oscillation measurement is performed by at least one laser interferometer (), whose measurement beam is directed onto various measurement points () of the object () for generating a scanning movement, and the obtained oscillation data is correlated with the position data of the respective measurement point () and evaluated or displayed. In particular, for three-dimensional measurements, the invention reduces the measurement complexity because the scanning device is a robot arm, which moves a measurement head of the laser interferometer to the desired measurement points on the object.

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Karlsruhe, Germany

Bernd Armbruster