Carl Zeiss Smt Gmbh

Bernard Stommen

Stefan Xalter

Peter Deufel

Yim Bun Patrick Kwan

Herman Soemers

Jeroen Van Aert

Frans H Van Deuren

Hendrick Dirk Visser

Aart Johannes Mateboer

Franz Van Deuren

Paul Peter Anne Brom

A housing structure has a frame structureon which there are arranged via connecting elementsseveral optical elementswhich are held in mountsor structural modules'. The optical elementsare detachably connected to the frame structurewith their mountsor structural modules&#x2032; and connecting elementsin such a way that in the installed state they are integrated as bearing units in the frame structure

Housing structure

In one embodiment, an actuator for positioning of mirrors in an optical system is provided and includes an actuator base and a reaction mass assembly. The reaction mass assembly includes a reaction mass support member having biasing features formed as a part thereof and a reaction mass that is coupled to the biasing features such that the reaction mass is suspended on biasing elements in six degrees of freedom (DOF). The support member is fixedly connected to the actuator base; however, the reaction mass is not directly attached to the actuator base but rather is supported in the reaction mass support member in a manner that allows it to have six DOF.

Six degree of freedom (DOF) actuator reaction mass

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Geldrop, Netherlands

Bernard Stommen